公开(公告)号：US20220187712A1

公开(公告)日：2022-06-16

申请号：US17603250

申请日：2020-04-03

Applicant: BASF SE

Inventor： Szilard Csihony ,  Daniel Loeffler ,  Marcel Brill ,  Frank Pirrung ,  Lothar Engelbrecht ,  Maike Bergeler ,  Paatrick Wilke ,  Yeni Burk ,  Volodymyr Boyko

IPC: G03F7/40 ,  C11D11/00 ,  C11D7/50 ,  C11D7/26 ,  H01L21/02

Abstract: Described herein is a non-aqueous composition including (a) an organic solvent, and (b) at least one additive of formulae I, where R1, R2, R3, and R4 are independently selected from C1 to C10 alkyl, C1 to C11 alkylcarbonyl, C6 to C12 aryl, C7 to C14 alkylaryl, and C7 to C14 arylalkyl; and n is 0 or 1.