公开(公告)号：US10801105B2

公开(公告)日：2020-10-13

申请号：US15775856

申请日：2016-11-18

Applicant: BASF SE

Inventor： Torben Adermann ,  Daniel Loeffler ,  Carolin Limburg ,  Falko Abels ,  Hagen Wilmer ,  Monica Gill ,  Matthew Griffiths ,  Sean Barry

IPC: C23C16/18 ,  C07F15/06 ,  C23C16/455

Abstract: The present invention is in the field of processes for the generation of thin inorganic films on substrates, in particular atomic layer deposition processes. The present invention relates to a process comprising bringing a compound of general formula (I) into the gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R1, R2, R3, and R4 are independent of each other an alkyl group, an aryl group or a trialkylsilyl group, M is Mn, Ni or Co, X is a ligand which coordinates M, wherein at least one X is a neutrally charged ligand, m is 1, 2 or 3 and n is at least 1 wherein the molecular weight of the compound of general formula (I) is up to 1000 g/mol.