公开(公告)号：US10170296B2

公开(公告)日：2019-01-01

申请号：US15310647

申请日：2015-05-12

申请人： BASF SE

发明人： Jerry Jhih-Jheng Ke ,  Tse Wei Yu ,  Yi-Ping Cheng

IPC分类号： C09K13/00 ,  H01L21/02 ,  C11D11/00 ,  H01L21/3213 ,  C11D3/37 ,  C11D3/39 ,  C11D7/26 ,  C11D7/32 ,  C11D7/34 ,  C11D7/50 ,  C11D17/04 ,  H01L21/311

摘要： The present invention relates to a novel composition that may be used to control the etching rate of TIN with respect to W, and remove any residues from the surface, e.g. organic or inorganic residues that could contain fluorine (F), which composition comprises a) an aliphatic or aromatic sulfonic acid; b) one or more inhibitor(s); c) an aprotic solvent; d) a glycol ether; and e) water. The present invention also relates to a kit comprising said composition in combination with an oxidant and optionally a stabilizer of the oxidant, and the use thereof.

公开(公告)号：US10141181B2

公开(公告)日：2018-11-27

申请号：US15310647

申请日：2015-05-12

申请人： BASF SE

发明人： Jerry Jhih-Jheng Ke ,  Tse Wei Yu ,  Yi-Ping Cheng

IPC分类号： C09K13/00 ,  H01L21/02 ,  C11D11/00 ,  H01L21/3213 ,  C11D3/37 ,  C11D3/39 ,  C11D7/26 ,  C11D7/32 ,  C11D7/34 ,  C11D7/50 ,  C11D17/04 ,  H01L21/311

摘要： The present invention relates to a novel composition that may be used to control the etching rate of TIN with respect to W, and remove any residues from the surface, e.g. organic or inorganic residues that could contain fluorine (F), which composition comprises a) an aliphatic or aromatic sulfonic acid; b) one or more inhibitor(s); c) an aprotic solvent; d) a glycol ether; and e) water. The present invention also relates to a kit comprising said composition in combination with an oxidant and optionally a stabilizer of the oxidant, and the use thereof.