公开(公告)号：US3842267A

公开(公告)日：1974-10-15

申请号：US33053773

申请日：1973-02-07

Applicant: BATTELLE DEVELOPMENT CORP

Inventor： GENEQUAND P

IPC: C23C14/54 ,  G01B15/00 ,  G01F1/64 ,  G01N27/64 ,  H01J41/04 ,  H01J49/30 ,  H01J39/34

CPC classification number: G01F1/64 ,  H01J41/04 ,  H01J49/30

Abstract: A method and apparatus for measuring, by ionization, the flux of vapour emitted by a substance subjected to vacuum vaporization, whereby a jet is produced within the vapour, and part of the particles contained in the jet are ionized. An essentially uniform magnetic field is produced in a volume crossed by the jet and is directed essentially perpendicularly to the jet, so that a section of the jet is permanently immersed in the magnetic field. The particles contained in a delimited volume situated within this section are ionized through being subjected to the action of at least one pulse of an ionizing radiation, so that the ionized particles constitute a package of ions describing, under the influence of the magnetic field, a circular trajectory. The amplitude of the variable component of the electric influence is measured which the package of ions exercises in the course of its revolutions along the circular trajectory on an electrode situated externally to the trajectory, the amplitude forming the measure of the flux.

Abstract translation: 通过离子化测量由真空蒸发的物质发射的蒸汽通量的方法和装置，由此在蒸气中产生射流，并且包含在射流中的部分颗粒被电离。 在由射流交叉的体积中产生基本上均匀的磁场，并且基本上垂直于射流引导，使得一部分射流永久地浸没在磁场中。 包含在位于该部分内的限定体积中的颗粒通过经受电离辐射的至少一个脉冲的作用而离子化，使得离子化的颗粒构成离子的包装，其描述在磁场的影响下 循环轨迹。 测量电影响的可变分量的幅度，其离子包在其位于轨迹外部的电极上的圆形轨迹的旋转过程中运动，振幅形成通量的测量。