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公开(公告)号:US11313971B1
公开(公告)日:2022-04-26
申请号:US17387561
申请日:2021-07-28
Applicant: BEIJING INSTITUTE OF TECHNOLOGY
Inventor: Lan Jiang , Baoshan Guo , Tianyong Zhang
IPC: G01C3/08 , G01S17/894 , H04N5/372 , G01B11/25 , G01S7/484
Abstract: A three-dimensional imaging system and method are provided. The three-dimensional imaging system includes: an ultrashort pulse laser light source configured to generate a detection beam; a supercontinuum spectrum generator configured to generate a supercontinuum spectrum based on the detection beam passing through the supercontinuum spectrum generator; a pulse separation delayer configured to generate a continuous pulse sequence of different wavelengths with a time interval based on the supercontinuum spectrum; a multi-frequency pulse interference fringe generator configured to generate multi-frequency interference fringe patterns of different wavelength ranges with a time interval based on the continuous pulse sequence; and an image acquisition device configured to acquire an optical signal reflected by a sample irradiated by the multi-frequency interference fringe patterns to obtain a three-dimensional topography of the sample.