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公开(公告)号:US3286690A
公开(公告)日:1966-11-22
申请号:US27919263
申请日:1963-05-09
Applicant: BELL TELEPHONE LABOR INC
Inventor: MCGLASSON JR JOHN , NELSON JAMES T
CPC classification number: C30B23/04 , C23C14/042 , H01L21/00
公开(公告)号:US3286690A
公开(公告)日:1966-11-22
申请号:US27919263
申请日:1963-05-09
Applicant: BELL TELEPHONE LABOR INC
Inventor: MCGLASSON JR JOHN , NELSON JAMES T
CPC classification number: C30B23/04 , C23C14/042 , H01L21/00