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公开(公告)号:US3316386A
公开(公告)日:1967-04-25
申请号:US36897564
申请日:1964-05-20
Applicant: BENDIX CORP
Inventor: YAFFE THEODORE H , VERGARA WILLIAM C , GREENHOUSE HAROLD M
CPC classification number: G01B7/06 , C23C14/548 , H01J41/04
公开(公告)号:US3316386A
公开(公告)日:1967-04-25
申请号:US36897564
申请日:1964-05-20
Applicant: BENDIX CORP
Inventor: YAFFE THEODORE H , VERGARA WILLIAM C , GREENHOUSE HAROLD M
CPC classification number: G01B7/06 , C23C14/548 , H01J41/04