-
公开(公告)号：US20180259263A1
公开(公告)日：2018-09-13
申请号：US15967348
申请日：2018-04-30
发明人： Xin XIANG , Zhiguang GUO , Benxiang HOU , Yunjie WANG , Fan YANG
CPC分类号： F27D21/0014 , G01J5/0044 , G01J5/025 , G01J5/041 , G01J5/042 , G01J5/0887
摘要： A temperature monitoring system for a substrate heating furnace includes a temperature monitor, and the temperature monitor is located on a prong of a mechanical arm which is configured to fetch and place a substrate. The temperature monitor is configured to monitor the temperature of the substrate which has been heated by the substrate heating furnace and is located on the prong.
-
2.发明申请公开(公告)号：US20200285126A1
公开(公告)日：2020-09-10
申请号：US15776039
申请日：2017-10-09
发明人： Benxiang HOU , Zhiguang GUO , Xilei YIN , Xin XIANG
摘要： A mask includes a base substrate, control switches provided on the base substrate, and electrochromic film components provided on the base substrate. The control switches and the electrochromic film components are connected in one-to-one correspondence. The control switches are configured to, according to at least one light shielding region and a light transmitting region of the mask, control light transmittances of the electrochromic film components in one-to-one correspondence.
-
公开(公告)号：US20180247750A1
公开(公告)日：2018-08-30
申请号：US15834395
申请日：2017-12-07
发明人： Benxiang HOU , Dahu TANG , Jun XIE
IPC分类号： H01F7/20 , G02F1/13 , G02F1/1335
CPC分类号： H01F7/20 , G02F1/1303 , G02F1/133516 , G02F1/1341 , H01F7/13 , H01F7/1646 , H01F2007/1866
摘要： The present disclosure provides an adsorption bar, a vacuum aligner system, and a control method of the vacuum aligner system. The adsorption bar includes an electromagnetic component and an adsorption member. The electromagnetic component includes a slide bar, a coil and a movable part. The coil is fixedly arranged on the slide bar. The movable part includes an elastic element and a magnet. One end of the elastic element is a fixed end which is fixedly connected to the slide bar, and the other end thereof is a free end which is connected to the magnet. The adsorption member is fixedly connected to the magnet and is exposed at one end, of the magnet, away from the coil. Current is applied to the coil to generate a magnetic field. The magnet longitudinally slides along the slide bar under a repulsive force of the magnetic field.
-
-
搜索结果
3 条记录 (耗时 0.018 秒)
