DRIVING BACKPLANE AND METHOD FOR MANUFACTURING THE SAME, AND DISPLAY DEVICE

    公开(公告)号:US20220068980A1

    公开(公告)日:2022-03-03

    申请号:US17213939

    申请日:2021-03-26

    IPC分类号: H01L27/12 H01L25/16

    摘要: Provided are a driving backplane and a method for manufacturing the same, a display device. The method includes: forming a first conductive pattern including signal lines; forming an insulating layer having via holes; forming a second conductive pattern including pairs of coupling electrodes; sequentially forming an inorganic material layer and an organic material layer; performing step exposure and developing on the organic material layer to form an intermediate pattern including a hollow-out portion, a completely-reserved portion and a half-reserved portion; the completely-reserved portion is thicker than the half-reserved portion, a thickness of the half-reserved portion is x times that of the inorganic material layer; etching the inorganic material layer and the intermediate pattern until a part of the inorganic material layer, corresponding to the hollow-out portion, is removed; an etching selection ratio of the inorganic material layer to the intermediate pattern is 1:y, 0