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公开(公告)号:US20180080975A1
公开(公告)日:2018-03-22
申请号:US15539898
申请日:2016-05-05
发明人: Min Xu , Jianyang Yu , Weiwei Sun , Zhen Wei
IPC分类号: G01R31/265 , H01L27/12 , H01L21/66
CPC分类号: G01R31/265 , G02F1/1303 , G02F1/1362 , G02F2001/136254 , H01L22/14 , H01L27/1214
摘要: A non-contact probe signal loading device is disclosed. The non-contact probe signal loading device includes a probe metal sheet electrically connected to a signal loading terminal, a lower surface of the probe metal sheet facing towards a signal inputting metal sheet into which a signal is to be loaded, wherein a signal transmitting capacitor is formed between the probe metal sheet and the signal inputting metal sheet, and the signal transmitting capacitor functions as a medium to transmit a loaded signal to the signal inputting metal sheet from the probe metal sheet.
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公开(公告)号:US10254131B2
公开(公告)日:2019-04-09
申请号:US15512890
申请日:2016-09-22
发明人: Guodong Li , Zhen Wei , Shibo Guo , Weiwei Sun , Chenchen Jiang , Qiong Zhao
摘要: A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.
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公开(公告)号:US10209295B2
公开(公告)日:2019-02-19
申请号:US15539898
申请日:2016-05-05
发明人: Min Xu , Jianyang Yu , Weiwei Sun , Zhen Wei
IPC分类号: G01R31/265 , H01L21/66 , H01L27/12 , G02F1/13 , G02F1/1362
摘要: A non-contact probe signal loading device is disclosed. The non-contact probe signal loading device includes a probe metal sheet electrically connected to a signal loading terminal, a lower surface of the probe metal sheet facing towards a signal inputting metal sheet into which a signal is to be loaded. A signal transmitting capacitor is formed between the probe metal sheet and the signal inputting metal sheet, and the signal transmitting capacitor functions as a medium to transmit a loaded signal to the signal inputting metal sheet from the probe metal sheet.
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公开(公告)号:US20170299407A1
公开(公告)日:2017-10-19
申请号:US15512890
申请日:2016-09-22
发明人: Guodong Li , Zhen Wei , Shibo Guo , Weiwei Sun , Chenchen Jiang , Qiong Zhao
IPC分类号: G01D5/20
CPC分类号: G01D5/20 , G01D5/2412
摘要: A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.
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