公开(公告)号：US11665441B2

公开(公告)日：2023-05-30

申请号：US17260087

申请日：2019-07-19

申请人： BRUKER NANO GMBH

发明人： Daniel Radu Goran ,  Luca Bombelli ,  Paolo Trigilio

IPC分类号： G01J1/46 ,  H04N25/42 ,  H04N25/75 ,  G01J1/44

CPC分类号： H04N25/42 ,  G01J1/46 ,  H04N25/75 ,  G01J2001/446

摘要： A pixelated sensor comprises a semiconductor substrate chip with a plurality of sensor pixels and a detector chip with a plurality of detector pixels. Each of the sensor pixels is configured as a photodiode and is electrically connected to an input node of one of the detector pixels. The detector pixels are further configured to convert and output the sensor input to an analog to digital converter. The detector chip further comprises first and second macropixels and a plurality of second macropixels, wherein each first macropixel is formed by subset of detector pixels switchably interconnected via a first conducting grid and wherein each second macropixel is formed by a subset of first macropixels switchably interconnected via a second conducting grid.