公开(公告)号：US11761913B2

公开(公告)日：2023-09-19

申请号：US17200918

申请日：2021-03-15

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Adam Ginsburg ,  Mark James Vermeulen ,  Paul Anthony Ryan ,  Matthew Wormington

IPC: G01N23/201 ,  G01N23/2055

CPC classification number: G01N23/201 ,  G01N23/2055 ,  G01N2223/054 ,  G01N2223/056 ,  G01N2223/6116

Abstract: A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.

公开(公告)号：US20210341397A1

公开(公告)日：2021-11-04

申请号：US17200918

申请日：2021-03-15

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Adam Ginsburg ,  Mark James Vermeulen ,  Paul Anthony Ryan ,  Matthew Wormington

IPC: G01N23/201

Abstract: A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.