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公开(公告)号:US12085521B2
公开(公告)日:2024-09-10
申请号:US18307823
申请日:2023-04-27
Applicant: Bruker Technologies Ltd.
Inventor: Alex Dikopoltsev , Matthew Wormington , Yuri Vinshtein , Alexander Krokhmal
IPC: G01N23/201 , G01N23/207 , G01N23/223 , G01T1/166
CPC classification number: G01N23/201 , G01N23/207 , G01N23/223 , G01T1/166 , G01N2223/6116
Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.
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公开(公告)号:US20240255403A1
公开(公告)日:2024-08-01
申请号:US18587732
申请日:2024-02-26
Applicant: CANON KABUSHIKI KAISHA
Inventor: RYO OGAWA , TAKAYUKI HIRATANI , KANA SATO , MASAHIRO WATANABE , TETSUO HINO
IPC: G01N3/42 , B08B1/16 , G01N23/201 , G03G21/00
CPC classification number: G01N3/42 , B08B1/16 , G01N23/201 , G01N2203/0082 , G03G21/0017
Abstract: The molded body is a non-foamed molded body including a polyurethane, wherein a Martens hardness measured at a point on the surface of the molded body positioned at a shortest distance from the center of gravity G is 1.0 N/mm2 or more, and three points of Martens hardness measured in a cross-section of the molded body satisfies a specific relational expression, wherein an index value Kω from a scattering profile obtained by allowing a characteristic X-ray from a Cu tube to incident on a surface region to be evaluated of the molded body satisfies a specific relational expression, and wherein the molded body has an erosion rate E of 0.6 μm/g or less, which is measured with spherical alumina particles having an average particle diameter (D50) of 3.0 μm in the surface region to be evaluated.
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公开(公告)号:US20240248050A1
公开(公告)日:2024-07-25
申请号:US18562508
申请日:2022-05-24
Applicant: XENOCS SAS
Inventor: Peter HOGHOJ , Karsten JOENSEN , Pierre PANINE
IPC: G01N23/201 , G01N23/20008
CPC classification number: G01N23/201 , G01N23/20008 , G01N2223/33
Abstract: An X-ray scattering apparatus has a sample vacuum chamber, a sample holder placed inside the sample vacuum chamber for aligning and/or orienting a sample to be analyzed by X-ray scattering, an X-ray beam delivery system having a 2D X-ray source and a 2D monochromator and being arranged upstream of the sample holder for generating and directing an X-ray beam along a beam path in a propagation direction towards the sample holder. An X-ray detector placed inside a diffraction chamber connected to the sample vacuum chamber where the X-ray detector is arranged downstream of the sample holder and is movable, in a motorized way, along the propagation direction so as to detect the X-ray beam and X-rays scattered at different scattering angles, where the X-ray beam delivery system is configured to focus the X-ray beam onto a focal spot on or near the X-ray detector when placed at its distal position.
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公开(公告)号:US11994454B2
公开(公告)日:2024-05-28
申请号:US17605065
申请日:2020-04-24
Applicant: Hitachi, Ltd. , TOYOTA JIDOSHA KABUSHIKI KAISHA
Inventor: Akinori Asahara , Hidekazu Morita , Takuya Kanazawa , Kanta Ono , Masao Yano , Tetsuya Shoji
IPC: G01N15/0205 , G01N23/201
CPC classification number: G01N15/0211 , G01N23/201
Abstract: Automated analysis of particle beam measurement results is facilitated by a device that calculates a spatial parameter distribution representing spatial structure of a sample based on a scattering pattern corresponding to projection of the spatial structure of the sample to wavenumber space, the projection being obtained by detecting scattering of a particle beam which enters the sample and intersects with the sample. The device includes a section to provide estimates for signals on the scattering pattern in association with at which point on a spatial parameter distribution of the sample interactions occur during scattering; a section to aggregate estimation results of the interaction estimation section to calculate a spatial parameter distribution of a sample matching an aggregated result; and a section to perform alternately and repeatedly estimation in the interaction estimation section and calculation in the parameter distribution calculation section in order to improve estimation accuracy in spatial parameter distributions.
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公开(公告)号:US20240077435A1
公开(公告)日:2024-03-07
申请号:US18307823
申请日:2023-04-27
Applicant: Bruker Technologies Ltd.
Inventor: Alex Dikopoltsev , Matthew Wormington , Yuri Vinshtein , Alexander Krokhmal
IPC: G01N23/201 , G01N23/207 , G01N23/223 , G01T1/166
CPC classification number: G01N23/201 , G01N23/207 , G01N23/223 , G01T1/166 , G01N2223/6116
Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.
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公开(公告)号:US20230384248A1
公开(公告)日:2023-11-30
申请号:US18228021
申请日:2023-07-31
Applicant: RIGAKU CORPORATION
Inventor: Naoki Matsushima , Kiyoshi Ogata , Sei Yoshihara , Yoshiyasu Ito , Kazuhiko Omote , Hiroshi Motono , Shigematsu Asano , Katsutaka Horada , Sensui Yasuda
IPC: G01N23/201 , G01N23/20016 , G01N23/20025
CPC classification number: G01N23/201 , G01N23/20016 , G01N23/20025 , G01N2223/054 , G01N2223/3306 , G01N2223/6116
Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.
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公开(公告)号:US11821856B2
公开(公告)日:2023-11-21
申请号:US17804048
申请日:2022-05-25
Applicant: Anton Paar GmbH
Inventor: Josef Gautsch , Helmut Gartler
IPC: G01N23/20 , G01N23/201 , G01N23/207 , G01N23/22 , G01N23/2206 , G01N23/20016 , G01N23/20025
CPC classification number: G01N23/2206 , G01N23/20016 , G01N23/20025 , G01N23/201 , G01N23/207 , G01N2223/045 , G01N2223/05 , G01N2223/071 , G01N2223/30 , G01N2223/317
Abstract: A device for examining a sample by X-radiation having a radiation generation system for generating primary radiation, a first goniometer arm on which the radiation generation system is mounted and which is pivotable about a goniometer axis, a detection system configured to detect secondary radiation emanating from the sample, a second goniometer arm on which the detection system is mounted and which is pivotable about the goniometer axis, and an evacuable sample chamber within which the sample is arrangeable in a sample region encompassing a portion of the goniometer axis, the sample chamber being delimited by a sample chamber wall which has a transmission region which is transmissive to the primary radiation and is vacuum-tight, in order to allow the primary radiation to penetrate into the sample chamber and to impinge on the sample region at different angles of incidence.
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公开(公告)号:US20230324317A1
公开(公告)日:2023-10-12
申请号:US17939145
申请日:2022-09-07
Applicant: Kioxia Corporation
Inventor: Takahiro IKEDA , Takashi ICHIKAWA , Takaki HASHIMOTO , Hiroyuki TANIZAKI
IPC: G01B15/04 , G01N23/201
CPC classification number: G01N23/201 , G01B15/04 , G01N2223/054 , G01N2223/611
Abstract: According to one embodiment, there is provided an inspection device including a measurement unit and a controller. The measurement unit measures a physical quantity in accordance with a predetermined pattern for a sample with the predetermined pattern, and generates a first spectral pattern in accordance with a measurement result. The controller predicts a processed cross-sectional shape by applying a parameter to a shape function indicating an ion flux amount in accordance with an etching depth in a case where the predetermined pattern is processed in dry etching processing, determines a second spectral pattern in accordance with the processed cross-sectional shape that has been predicted, adjusts the parameter while comparing the first spectral pattern with the second spectral pattern, and reconstructs the processed cross-sectional shape of the sample in accordance with an adjustment result.
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公开(公告)号:US20230258585A1
公开(公告)日:2023-08-17
申请号:US17673594
申请日:2022-02-16
Applicant: KLA Corporation
Inventor: Stilian Ivanov Pandev
IPC: G01N23/201 , G06N3/08
CPC classification number: G01N23/201 , G06N3/08 , H01L21/67288
Abstract: Methods and systems for improved monitoring of tool drift and tool-to-tool matching across large fleets of measurement systems employed to measure semiconductor structures are presented herein. One or more Quality Control (QC) wafers are measured by each of a fleet of measurement systems. Values of system variables are extracted from the QC measurement data associated with each measurement system using a trained QC encoder. The extracted values of the system variables are employed to condition the corresponding measurement model employed by each measurement tool to characterize structures under measurement having unknown values of one or more parameters of interest. Accurate tool-to-tool matching across a fleet of conditioned measurement systems is achieved by extracting values of system variables from measurement data collected from the same set of QC wafers. Tool health is monitored based on changes in values of system variables extracted from measurements performed at different times.
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公开(公告)号:US11726049B2
公开(公告)日:2023-08-15
申请号:US17921235
申请日:2021-05-04
Applicant: Amphastar Pharmaceuticals, inc.
Inventor: Jack Yongfeng Zhang , Mary Zi-Ping Luo , Thang Kien Chiu , Anthony Marrs , Selina Su
IPC: G01N23/201 , G01N15/02 , G01N23/207 , G01N33/15
CPC classification number: G01N23/201 , G01N15/02 , G01N23/207 , G01N33/15 , G01N2223/054 , G01N2223/056 , G01N2223/60
Abstract: The present disclosure introduces methods for characterizing iron core carbohydrate colloid drug products, such as iron sucrose drug products. Disclosed methods enable the characterization of the iron core size of the iron core nanoparticles in iron carbohydrates as they exist in the formulation in solution, such as e.g. iron sucrose drug products, and more particularly, the average particle diameter size and size distribution(s) of the iron core nanoparticles. The disclosed methods apply small-angle X-ray scattering (SAXS) in parallel beam transmission geometry, with a sample mounted inside a capillary and centered in the X-ray beam, to iron carbohydrates, such as iron sucrose, in solution without the need to modify the sample, such as to remove unbound carbohydrates, dilute, or dry the sample, to accurately characterize the average iron core particle diameter size of the iron core nanoparticles. An example application of the disclosed method is to perform SAXS measurements under identical instrument settings on two samples of the same type of iron core nanoparticle colloid drug product for the purpose of comparing their iron core structures. Such comparisons are typically performed during the iron core carbohydrate colloid drug development process, and can include comparisons of samples that have been manipulated.
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