公开(公告)号：US20070097340A1

公开(公告)日：2007-05-03

申请号：US11262882

申请日：2005-10-31

申请人： Bausan Yuan ,  Ping-Wei Chang ,  Ryoichi Kawaguchi ,  Kazuo Masaki ,  Susumu Makinouchi ,  Ting-Chien Teng

发明人： Bausan Yuan ,  Ping-Wei Chang ,  Ryoichi Kawaguchi ,  Kazuo Masaki ,  Susumu Makinouchi ,  Ting-Chien Teng

IPC分类号： G03B27/42

CPC分类号： G03F7/709 ,  F16F7/1005 ,  G03F7/70766 ,  G03F7/70833

摘要： Methods and apparatus for actively damping vibrations associated with a optical assembly of a photolithographic system are disclosed. According to one aspect of the present invention, an assembly that provides damping to a structure of a photolithographic apparatus that is subject to structural oscillations includes a counter mass, an active mechanism, an a controller. The active mechanism is coupled to the structure, supports the counter mass, and applies a force to the structure to counteract structural oscillations in the structure. The controller controls the force applied by the active mechanism on the structure, and utilizes information associated with movement of the structure to control the force.

摘要翻译： 公开了用于主动衰减与光刻系统的光学组件相关的振动的方法和装置。 根据本发明的一个方面，一种对经受结构振荡的光刻设备的结构提供阻尼的组件包括反质量块，活动机构，控制器。 主动机构耦合到结构，支撑反质量，并向结构施加力以抵消结构中的结构振荡。 控制器控制主动机构施加在结构上的力，并利用与结构的运动相关联的信息来控制力。

公开(公告)号：US20060241873A1

公开(公告)日：2006-10-26

申请号：US11115673

申请日：2005-04-26

申请人： Yi-Ping Hsin ,  Gabor Szoboszlay ,  Kazuhiro Hirano ,  Kazuo Masaki ,  Christopher Smith ,  Ryoichi Kawaguchi ,  Bausan Yuan

发明人： Yi-Ping Hsin ,  Gabor Szoboszlay ,  Kazuhiro Hirano ,  Kazuo Masaki ,  Christopher Smith ,  Ryoichi Kawaguchi ,  Bausan Yuan

IPC分类号： G06F19/00

CPC分类号： G03F7/70766 ,  G03F7/70725

摘要： Embodiments of the invention relate to a cable force feedforward approach that takes into account the cable force in the counter-mass trajectory computation to reduce or eliminate vibration of the lens body caused by the cable force disturbance and corrective force exerted by the trim motors. In one embodiment, a method provides cable force feedforward control for a counter-mass of a stage with a cable connected to the counter-mass and using the cable force feedforward control to control one or more trim motors to produce a trim motor output force to be applied to the counter-mass, the counter-mass moving in response to a reaction force from movement of the stage. The method comprises measuring a counter-mass position y of the counter-mass in response to forces applied to the counter-mass; measuring a cable force ƒ exerted on the counter-mass by the cable which is connected to the counter-mass; generating a cable force function {circumflex over (ƒ)}(y, {dot over (y)}) of the measured cable force ƒ versus the counter-mass position y; and computing the trim motor output force u as , where w is a weighting function having a value from 0 to 1 and is selected for optimization.

摘要翻译： 本发明的实施例涉及一种电缆力前馈方法，其考虑到反质量轨迹计算中的电缆力，以减少或消除由电缆力扰动引起的透镜体的振动和由修剪马达施加的校正力。 在一个实施例中，一种方法为具有连接到反质量体的电缆的级的反质量提供电缆力前馈控制，并且使用电缆力前馈控制来控制一个或多个微调电动机以产生微调电动机的输出力 应用于反质量体，响应于舞台运动的反作用力而进行反质量运动。 该方法包括响应于施加到反质量块的力量来测量反质量块的反质量位置y; 通过连接到反质量块的电缆测量施加在反质量块上的电缆力f; 产生电缆力函数{（f）}（y，{dot over（y））测量的电缆力f与反质量位置y的关系;以及计算微调电机输出力u，其中w是加权 函数具有从0到1的值并且被选择用于优化。

公开(公告)号：US07366642B2

公开(公告)日：2008-04-29

申请号：US11115673

申请日：2005-04-26

申请人： Yi-Ping Hsin ,  Gabor D. Szoboszlay ,  Kazuhiro Hirano ,  Kazuo Masaki ,  Christopher B. Smith ,  Ryoichi Kawaguchi ,  Bausan Yuan

发明人： Yi-Ping Hsin ,  Gabor D. Szoboszlay ,  Kazuhiro Hirano ,  Kazuo Masaki ,  Christopher B. Smith ,  Ryoichi Kawaguchi ,  Bausan Yuan

IPC分类号： G06F15/00

CPC分类号： G03F7/70766 ,  G03F7/70725

摘要： Embodiments of the invention relate to a cable force feedforward approach that takes into account the cable force in the counter-mass trajectory computation to reduce or eliminate vibration of the lens body caused by the cable force disturbance and corrective force exerted by the trim motors. In one embodiment, a method provides cable force feedforward control for a counter-mass of a stage with a cable connected to the counter-mass and using the cable force feedforward control to control one or more trim motors to produce a trim motor output force to be applied to the counter-mass, the counter-mass moving in response to a reaction force from movement of the stage. The method comprises measuring a counter-mass position y of the counter-mass in response to forces applied to the counter-mass; measuring a cable force ƒ exerted on the counter-mass by the cable which is connected to the counter-mass; generating a cable force function {circumflex over (ƒ)}(y, {dot over (y)}) of the measured cable force ƒ versus the counter-mass position y; and computing the trim motor output force u as u ≅ - f + w · f ^ ⁡ ( y , y . ) , where w is a weighting function having a value from 0 to 1 and is selected for optimization.

公开(公告)号：US5793052A

公开(公告)日：1998-08-11

申请号：US819951

申请日：1997-03-18

申请人： Ryoichi Kawaguchi

发明人： Ryoichi Kawaguchi

IPC分类号： B23K26/04 ,  G03F7/20 ,  H01L21/027 ,  G01N21/86

CPC分类号： G03F7/70691 ,  B23K26/04 ,  G03F7/70358

摘要： A method and apparatus minimizes the relative difference between motions of two stages driven by a single input signal, where the motions of the two stages ideally are perfectly synchronized. In practice, synchronization is imperfect due to mechanical/environmental disturbances in each stage as well as electrical differences affecting the stage controller. The two stages are serially coupled for control purposes so that a signal indicating the position of the first stage is used as an input driving signal to the second stage. The relative location error between the two stages is thereby minimized, compared to the case where the two stages are driven simultaneously but in parallel by a common input signal. Furthermore, by using the lower bandwidth stage as the driver (first) stage and the higher bandwidth stage as the follower (second) stage, the relative position error is no larger than the smaller of the absolute position errors of either stage alone. One exemplary application is improved alignment of a reticle stage and a wafer stage in a scanning exposure system for semiconductor lithography.

摘要翻译： 一种方法和装置使由单个输入信号驱动的两个级的运动之间的相对差异最小化，其中两级的运动理想地完全同步。 实际上，由于每个阶段的机械/环境干扰以及影响舞台控制器的电气差异，同步是不完美的。 这两个级串联连接用于控制目的，使得指示第一级的位置的信号被用作到第二级的输入驱动信号。 与两个级同时驱动但由公共输入信号并行驱动的情况相比，两级之间的相对位置误差因而最小化。 此外，通过使用较低带宽级作为驱动器（第一级）和较高带宽级作为跟随器（第二级），相对位置误差不大于任一级单独的绝对位置误差的较小值。 一个示例性应用是用于半导体光刻的扫描曝光系统中的掩模版台和晶片台的对准改进。