公开(公告)号：US08805556B2

公开(公告)日：2014-08-12

申请号：US12495915

申请日：2009-07-01

申请人： Kazuaki Saiki ,  Ping-Wei Chang

发明人： Kazuaki Saiki ,  Ping-Wei Chang

IPC分类号： G05B19/18

CPC分类号： H01L21/67092 ,  G03F7/70775 ,  G03F7/7085 ,  G03F7/709 ,  H01L21/68785

摘要： A damping apparatus that supports and dampens a stage apparatus that positions and drives a stage to a target position is provided herein. The damping apparatus including a support plate part, a support force generating means, and a first controlling means. The support plate part supports the stage apparatus. The support force generating means exerts a damping action by applying a support force to the support plate part in the vertical directions. The first controlling means uses the acceleration of the stage, which is derived from a target track, to the target position, to control the support force generated by the support force generating means so as to compensate for forces that both occur as a result of the acceleration of the stage and cause the support plate part to tilt. The present invention controls vibration and the tilt of a base plate with high precision.

摘要翻译： 本文提供了一种阻尼装置，其支撑和阻尼将台架定位和驱动到目标位置的平台装置。 该阻尼装置包括支撑板部分，支撑力产生装置和第一控制装置。 支撑板部件支撑平台装置。 支撑力产生装置通过在垂直方向上向支撑板部分施加支撑力来施加阻尼作用。 第一控制装置使用从目标轨道导出的平台的加速度到目标位置，以控制由支撑力产生装置产生的支撑力，以便补偿由于 加速阶段并使支撑板部分倾斜。 本发明以高精度控制基板的振动和倾斜。

公开(公告)号：US20100001168A1

公开(公告)日：2010-01-07

申请号：US12495915

申请日：2009-07-01

申请人： Kazuaki Saiki ,  Ping-Wei Chang

发明人： Kazuaki Saiki ,  Ping-Wei Chang

IPC分类号： H01L21/67 ,  H01L21/027

CPC分类号： H01L21/67092 ,  G03F7/70775 ,  G03F7/7085 ,  G03F7/709 ,  H01L21/68785

摘要： A damping apparatus that supports and dampens a stage apparatus that positions and drives a stage to a target position is provided herein. The damping apparatus including a support plate part, a support force generating means, and a first controlling means. The support plate part supports the stage apparatus. The support force generating means exerts a damping action by applying a support force to the support plate part in the vertical directions. The first controlling means uses the acceleration of the stage, which is derived from a target track, to the target position, to control the support force generated by the support force generating means so as to compensate for forces that both occur as a result of the acceleration of the stage and cause the support plate part to tilt. The present invention controls vibration and the tilt of a base plate with high precision.

摘要翻译： 本文提供了一种阻尼装置，其支撑和阻尼将台架定位和驱动到目标位置的平台装置。 该阻尼装置包括支撑板部分，支撑力产生装置和第一控制装置。 支撑板部件支撑平台装置。 支撑力产生装置通过在垂直方向上向支撑板部分施加支撑力来施加阻尼作用。 第一控制装置使用从目标轨道导出的平台的加速度到目标位置，以控制由支撑力产生装置产生的支撑力，以便补偿由于 加速阶段并使支撑板部分倾斜。 本发明以高精度控制基板的振动和倾斜。

公开(公告)号：US07133257B2

公开(公告)日：2006-11-07

申请号：US11038332

申请日：2005-01-18

申请人： Ping-Wei Chang ,  Chie Ching Poon ,  John Raniseski ,  Andrew C. Tam

发明人： Ping-Wei Chang ,  Chie Ching Poon ,  John Raniseski ,  Andrew C. Tam

IPC分类号： G11B5/60 ,  G11B5/127

CPC分类号： G11B5/4826 ,  G11B5/6082 ,  Y10T29/49036

摘要： Embodiments include a method for adjusting the twist, crown and camber of an air bearing surface a slider to substantially match final target values for twist, crown and camber, the slider having a back surface opposite the air bearing surface. The method includes the steps of measuring the twist, crown and camber of the at least one slider. A first group of twist scribes may be formed on the back surface. A first group of crown and camber scribes are formed on the back surface. The twist, crown and camber of the slider are measured and comparing to the final target values. Additional twist scribes may be formed if the final target value for twist is not reached or if the final target value is exceeded. Additional crown and camber scribes may be formed if the final target values for crown and camber are not obtained.

摘要翻译： 实施例包括一种用于调节空气轴承表面的扭转，冠部和弯度的方法，该滑块用于基本上匹配用于扭转，冠部和弯度的最终目标值，滑块具有与空气支承表面相对的后表面。 该方法包括以下步骤：测量至少一个滑块的扭转，凸度和弯度。 可以在后表面上形成第一组扭转划线。 在背面形成第一组冠和弧形文字。 测量滑块的扭曲，凸度和弯度，并与最终目标值进行比较。 如果没有达到扭曲的最终目标值或超过最终目标值，则可以形成额外的扭转划线。 如果没有获得冠和弯度的最终目标值，则可以形成额外的冠和弧形划线。

公开(公告)号：US20050218842A1

公开(公告)日：2005-10-06

申请号：US10819041

申请日：2004-04-05

申请人： Pai-Hsueh Yang ,  Kazuhiro Hirano ,  Ping-Wei Chang ,  Tim Teng ,  Bausan Yuan

发明人： Pai-Hsueh Yang ,  Kazuhiro Hirano ,  Ping-Wei Chang ,  Tim Teng ,  Bausan Yuan

IPC分类号： H02P1/00 ,  H02P25/06

CPC分类号： H02P25/06

摘要： A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.

摘要翻译： 用于移动设备（200）的平台组件（220）包括平台（208）和致动器对（226）和控制系统（224）。 致动器对（226）包括联接到平台（208）的第一致动器（228）。 第一致动器（228）具有第一E型芯（236）和第一I型芯（240），其与第一E型芯（236）间隔开第一间隙（g 1> 1）。 控制系统（224）将电流引导到第一致动器（228）以移动平台（208）。 在一个实施例中，使用添加到第一间隙（g 1> 1）的第一参数（a）来确定引导到第一致动器（228）的电流量。 第一个参数（a）的值由实验测试确定。 另外，可以利用添加到第一间隙（g1> 1）的第二参数（b）来确定引导到第一致动器（228）的电流量。 第二个参数（b）的值由实验测试确定。

公开(公告)号：US06917412B2

公开(公告)日：2005-07-12

申请号：US10375785

申请日：2003-02-26

申请人： Alex Ka Tim Poon ,  Leonard Wai Fung Kho ,  Pai-Hsueh Yang ,  Ping-Wei Chang

发明人： Alex Ka Tim Poon ,  Leonard Wai Fung Kho ,  Pai-Hsueh Yang ,  Ping-Wei Chang

IPC分类号： G03F7/20 ,  G03B27/58 ,  G03B27/42 ,  G03B27/62 ,  G03B27/32

CPC分类号： G03F7/70766 ,  G03F7/70716 ,  G03F7/70758

摘要： Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.

摘要翻译： 描述了用于提供模块化并允许反作用力抵消的平台装置的方法和装置。 根据本发明的一个方面，一种台架装置包括台组件和第一台。 桌子组件支撑要移动的物体，例如，晶片或掩模版。 第一阶段包括对质量布置，多个托架和多个连杆。 多个滑架通过多个连杆联接到工作台组件，使得第一滑架和第二滑架被布置成沿着第一轴线在基本上相反的方向上移动，以使台面组件沿着第二轴线移动，同时反作用力 当第一托架和第二托架基本上被反质量布置取消时产生。

公开(公告)号：US06888701B2

公开(公告)日：2005-05-03

申请号：US09916856

申请日：2001-07-27

申请人： Ping-Wei Chang ,  Chie Ching Poon ,  Andrew C. Tam

发明人： Ping-Wei Chang ,  Chie Ching Poon ,  Andrew C. Tam

IPC分类号： G11B5/60 ,  G11B5/127 ,  B23K26/00 ,  H04R31/00

CPC分类号： G11B5/60 ,  Y10T29/49036

摘要： Embodiments include a method for adjusting the twist of an air bearing surface of at least one slider to substantially match a target values for twist, the at least one slider having a back surface opposite the air bearing surface, the back surface including two sets of diagonally opposite corner regions, with each set including one corner region adjacent to a leading edge of the slider and one corner region adjacent to a trailing edge of the slider. The method includes forming a first mechanical scribe on the back surface extending through at least a portion of the corner regions adjacent to the leading edge of the slider and forming a second mechanical scribe on the back surface extending through at least a portion of the corner regions adjacent to the trailing edge of the slider. The method also includes measuring the twist of the slider, and forming a first group of laser scribes on the back surface in one of the two sets of diagonally opposite corner regions, wherein each of the laser scribes intersects with one of the first and second mechanical scribes. The method also includes measuring the twist of the slider and comparing the values to the target value for twist, and forming additional laser scribes if the target value for twist is not reached.

摘要翻译： 实施例包括一种用于调节至少一个滑块的空气轴承表面的扭曲以基本上匹配扭转目标值的方法，所述至少一个滑块具有与空气轴承表面相对的后表面，所述后表面包括两组对角线 每个组包括与滑块的前缘相邻的一个角区域和与滑块的后缘相邻的一个角区域。 该方法包括在后表面上形成第一机械刻痕，其延伸穿过与滑块的前缘相邻的角部区域的至少一部分，并且在后表面上形成延伸穿过角部区域的至少一部分的第二机械划线 邻近滑块的后缘。 该方法还包括测量滑块的扭曲，以及在两组对角线相对的拐角区域中的一组中的后表面上形成第一组激光划线，其中每个激光划线器与第一和第二机械 文士 该方法还包括测量滑块的扭曲并将该值与目标值进行比较，如果没有达到扭曲的目标值，则形成附加的激光划片。

公开(公告)号：US20070030462A1

公开(公告)日：2007-02-08

申请号：US11197576

申请日：2005-08-03

申请人： Bausan Yuan ,  Martin Lee ,  Alton Phillips ,  Ping-Wei Chang ,  Akimitsu Ebihara

发明人： Bausan Yuan ,  Martin Lee ,  Alton Phillips ,  Ping-Wei Chang ,  Akimitsu Ebihara

IPC分类号： F16M1/00 ,  G03B27/00

CPC分类号： G02B7/005

摘要： Embodiments of the present invention are directed to an apparatus for providing a low spring constant, pneumatic suspension using vacuum for the lens in a projection system. In one embodiment, a pneumatic suspension system for a load comprises a frame; and a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load. The frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame. An air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame. The pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame.

摘要翻译： 本发明的实施例涉及一种用于在投影系统中为透镜提供使用真空的低弹簧常数气动悬架的装置。 在一个实施例中，用于负载的气动悬挂系统包括框架; 以及主体，其可移动地设置在所述框架中并且通过间隙与所述框架的侧壁间隔开以在所述主体中的所述框架中限定室，所述主体被配置为连接到所述负载。 该框架包括从腔室抽出气体的出口，以相对于框架外部的环境压力降低腔室中的压力。 空气轴承形成在主体和框架的侧壁之间的间隙中，以在主体和框架之间提供非接触。 室内的压力足够低于环境压力，以产生升高力以提升主体和相对于框架连接到其上的负载。

公开(公告)号：US20060232886A1

公开(公告)日：2006-10-19

申请号：US11425666

申请日：2006-06-21

申请人： Ping-Wei Chang ,  Brad Jackson ,  Bulent Kurdi ,  Jennifer Lu ,  Dennis McKean ,  Eun Row

发明人： Ping-Wei Chang ,  Brad Jackson ,  Bulent Kurdi ,  Jennifer Lu ,  Dennis McKean ,  Eun Row

IPC分类号： G11B5/60

CPC分类号： G11B5/6082 ,  G11B5/3173

摘要： A process to reduce step heights in planarization of thin film carriers in an encapsulation system. The improvements include using an adhesive tape having a thinner adhesive thickness and a stiffer tape for the film sealing the encapsulant on the carrier to result in a low step height surface transition between the carrier and the cured encapsulant. The composition of the encapsulant is modified to reduce the shrinkage upon curing of the encapsulant. The encapsulant may include an absorbent that absorbs the irradiation and cause the top surface to harden first compared to the bulk of the encapsulant, and/or a gas-emitting additive that creates gaseous products that expand upon irradiation to thereby reduce the shrinkage of the encapsulant upon curing. Alternatively, irradiation at very low incidence angle relative to the top surface of the encapsulant causes the top surface to harden before the bulk of the encapsulant.

摘要翻译： 一种降低封装系统中薄膜载体平面化阶跃高度的方法。 这些改进包括使用具有较薄粘合剂厚度的粘合带和用于将密封剂密封在载体上的较硬的胶带，导致载体和固化的密封剂之间的低台阶高度表面过渡。 改进密封剂的组成以减少密封剂固化时的收缩。 密封剂可以包括吸收辐射的吸收剂，并且使顶部表面首先与密封剂的主体相比硬化，和/或产生气体产物的气体发射添加剂，其在照射时膨胀，从而减小密封剂的收缩 固化后。 或者，相对于密封剂的顶表面以非常低的入射角照射导致顶表面在大部分密封剂之前硬化。

公开(公告)号：US20050180051A1

公开(公告)日：2005-08-18

申请号：US11038332

申请日：2005-01-18

申请人： Ping-Wei Chang ,  Chie Poon ,  John Raniseski ,  Andrew Tam

发明人： Ping-Wei Chang ,  Chie Poon ,  John Raniseski ,  Andrew Tam

IPC分类号： G11B5/48 ,  G11B5/60

CPC分类号： G11B5/4826 ,  G11B5/6082 ,  Y10T29/49036

摘要： Embodiments include a method for adjusting the twist, crown and camber of an air bearing surface a slider to substantially match final target values for twist, crown and camber, the slider having a back surface opposite the air bearing surface. The method includes the steps of measuring the twist, crown and camber of the at least one slider. A first group of twist scribes may be formed on the back surface. A first group of crown and camber scribes are formed on the back surface. The twist, crown and camber of the slider are measured and comparing to the final target values. Additional twist scribes may be formed if the final target value for twist is not reached or if the final target value is exceeded. Additional crown and camber scribes may be formed if the final target values for crown and camber are not obtained.

摘要翻译： 实施例包括一种用于调节空气轴承表面的扭转，冠部和弯度的方法，该滑块用于基本上匹配用于扭转，冠部和弯度的最终目标值，滑块具有与空气支承表面相对的后表面。 该方法包括以下步骤：测量至少一个滑块的扭转，凸度和弯度。 可以在后表面上形成第一组扭转划线。 在背面形成第一组冠和弧形文字。 测量滑块的扭曲，凸度和弯度，并与最终目标值进行比较。 如果没有达到扭曲的最终目标值或超过最终目标值，则可以形成额外的扭转划线。 如果没有获得冠和弯度的最终目标值，则可以形成额外的冠和弧形划线。

公开(公告)号：US06831249B2

公开(公告)日：2004-12-14

申请号：US10651592

申请日：2003-08-29

申请人： Andrew Ching Tam ,  Chie Ching Poon ,  Ping-Wei Chang

发明人： Andrew Ching Tam ,  Chie Ching Poon ,  Ping-Wei Chang

IPC分类号： B23K2600

CPC分类号： G11B5/6005 ,  B21D11/20 ,  B23K26/02 ,  B23K26/0622 ,  B23K26/073 ,  G11B21/21

摘要： A method and apparatus for producing very high crown and camber curvature in slider materials using a laser processing system which produces fluence which is variable in a controllable manner, by applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material. The fluence is variable by finely controlling the power output of the laser or by changing the spot size of the laser beam. The beam spot size can be changed by using a focusing lens to establish a focal plane and then varying the relative positions of the slider relative and the focal plane. An apparatus for producing high crown and camber is also disclosed, as well as a slider produced by the process of applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material.

摘要翻译： 一种使用激光处理系统在滑块材料中产生非常高的冠和弧度曲率的方法和装置，该激光处理系统通过将激光束施加到滑块材料的弯曲侧并改变其能量密度而产生以可控方式变化的能量密度 激光束优化滑块材料的曲率。 通过精细地控制激光器的功率输出或通过改变激光束的光斑尺寸，注量变化是可变的。 可以通过使用聚焦透镜来建立焦平面，然后改变滑块相对和焦平面的相对位置来改变束点尺寸。还公开了一种用于制造高冠和弧度的装置，以及一个制造的滑块 通过将激光束施加到滑块材料的弯曲侧并改变激光束的注量以优化滑块材料中的曲率的过程。