公开(公告)号：US07595534B2

公开(公告)日：2009-09-29

申请号：US10433969

申请日：2001-12-06

申请人： Bernd Heinemann ,  Karl-Ernst Ehwald ,  Dieter Knoll ,  Bernd Tillack ,  Dirk Wolansky ,  Peter Schley

发明人： Bernd Heinemann ,  Karl-Ernst Ehwald ,  Dieter Knoll ,  Bernd Tillack ,  Dirk Wolansky ,  Peter Schley

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

CPC分类号： H01L21/74 ,  H01L21/26506 ,  H01L21/823807 ,  H01L21/823892 ,  H01L29/1083

摘要： The invention relates to layers in substrate wafers. The aim of the invention is to provide layers in substrate wafers with which the drawbacks of conventional assemblies are overcome in order to achieve, on the one hand, an adequate resistance to latch-up in highly scaled, digital CMOS circuits with comparatively low costs and, on the other hand, to ensure low substrate losses/couplings for analog high-frequency circuits and, in addition, to influence the component behavior in a non-destructive manner. To these ends, the invention provides that in a highly resistive p-Si substrate (2) with one or more buried high-carbon Si layers (3) under an epitaxial layer and with the Si cap layer (4), an implantation dose, which is greater in comparison to conventional substrate wafers, is used for retrograde trough profiles by suppressing the dopant diffusion as well as the generation of defects when remedying implant defects, thereby achieving a reduction of the trough resistance, and finally, an increase in the resistance to latch-up.

摘要翻译： 本发明涉及衬底晶片中的层。 本发明的目的是提供衬底晶片中的层，其中克服了常规组件的缺点，以便一方面实现具有相对较低成本的高度缩放的数字CMOS电路中的闩锁的适当电阻，以及 另一方面，为了确保模拟高频电路的低衬底损耗/耦合，此外，以非破坏性的方式影响组件行为。 为此，本发明提供了在具有一个或多个掩埋的高碳Si层（3）的外延层和Si覆盖层（4）下的高电阻p-Si衬底（2）中的注入剂量， 与传统的基板晶片相比，通过抑制掺杂剂扩散以及在补偿注入缺陷时产生缺陷而用于逆向槽型材，从而实现了谷电阻的降低，最后增加了电阻 闭锁

公开(公告)号：US06244097B1

公开(公告)日：2001-06-12

申请号：US09463571

申请日：2000-04-27

申请人： Peter Schley ,  Manfred Jaeschke ,  Reiner Kleinrahm ,  Renee Janssen-van Rosmalen ,  Jan A. Schouten

发明人： Peter Schley ,  Manfred Jaeschke ,  Reiner Kleinrahm ,  Renee Janssen-van Rosmalen ,  Jan A. Schouten

IPC分类号： G01N2500

CPC分类号： G01N9/36 ,  G01N33/225

摘要： The fuel gas or a substream of the fuel gas is passed through a volumetric flowmeter and the volumetric gas flow is measured. In addition, the pressure, temperature and the proportion of at least one inert gas as well as the density and the dielectric constant are measured under reference conditions. The amount of heat supplied to gas consumption devices can be determined from these six parameters reliably without complicated technology.

摘要翻译： 燃料气体或燃料气体的子流通过体积流量计，并测量体积气体流量。 此外，在参考条件下测量至少一种惰性气体的压力，温度和比例以及密度和介电常数。 可以从这六个参数可靠地确定供应给气体消耗装置的热量，而不需要复杂的技术。

公开(公告)号：US06490908B2

公开(公告)日：2002-12-10

申请号：US09967584

申请日：2001-09-28

申请人： Peter Schley

发明人： Peter Schley

IPC分类号： G01N1910

CPC分类号： G01N21/3504 ,  G01N21/85 ,  G01N33/225

摘要： The invention relates to a method and a device to determine the gas properties of combustible gas, in particular of natural gas, wherein a) at least part of the combustible gas is exposed to infrared radiation and the amount of infrared radiation absorbed by the combustible gas is determined for two wave lengths or spectral ranges, the two wave lengths or spectral ranges being selected so that the amounts of individual components of the combustible gas in their different percentages have an effect on the amounts absorbed and recorded, b) the thermal conductivity is recorded and c) the gas properties are determined from the three measurands. The term gas properties is understood to mean the gas composition, the gross heating value, the Wobbe number, the normal density and the methane number.

摘要翻译： 本发明涉及一种确定可燃气体特别是天然气的气体性质的方法和装置，其中a）至少部分可燃气体暴露于红外辐射，并且可燃气体吸收的红外辐射量为 对于两个波长或光谱范围确定，选择两个波长或光谱范围，使得可燃气体的各组分的量在其不同百分比中对吸收和记录的量具有影响，b）记录热导率 气体性质由三个测量值确定。术语气体性质被理解为气体组成，总热值，沃泊数，正常密度和甲烷数。

公开(公告)号：US06279380B1

公开(公告)日：2001-08-28

申请号：US09315237

申请日：1999-05-20

申请人： Petrus J. M. M. Van Wesenbeeck ,  Manfred Jaeschke ,  Johannes A. Schouten ,  Peter Schley

发明人： Petrus J. M. M. Van Wesenbeeck ,  Manfred Jaeschke ,  Johannes A. Schouten ,  Peter Schley

IPC分类号： G01N3322

CPC分类号： G01N33/225 ,  G01N27/221 ,  G01N2291/02863

摘要： Noncombustive method of measuring the calorific value of fuel gas, wherein a) the speed of sound in the gas is determined under first and under second reference conditions and one of the parameters dielectric constant, speed of sound under third reference conditions or proportion of carbon dioxide in the fuel gas is measured and b) the calorific value is derived from these three parameters, wherein the steps a) and b) are preferably preceded by a plurality of measurement cycles in which step a) is carried out using a plurality of reference gases of known calorific value, a number corresponding to the number of measurement cycles of reference signal patterns determined from the ratio of the various measurement signals measured on the reference gases are stored with assignment to the known calorific values and the signal pattern from a future measurement cycle on fuel gas of unknown calorific value is compared with the reference signal patterns so as to assign a particular calorific value.

摘要翻译： 测量燃气的热值的非燃烧方法，其中a）在第一和第二参考条件下确定气体中的声速，并且在第三参考条件下的声参数介电常数，速度或二氧化碳的比例 测量燃料气体，并且b）热值来自这三个参数，其中步骤a）和b）优选地在多个测量循环之前，其中步骤a）使用已知的多个参考气体进行 存储与根据在参考气体上测量的各种测量信号的比率确定的参考信号模式的测量周期数相对应的数字，其分配给已知的热值和来自燃料的未来测量周期的信号模式 将未知热值的气体与参考信号图案进行比较，以分配特定的热值。