Ionization vacuum measuring cell
    1.
    发明授权
    Ionization vacuum measuring cell 有权
    电离真空测量池

    公开(公告)号:US09116065B2

    公开(公告)日:2015-08-25

    申请号:US14237007

    申请日:2012-08-02

    CPC classification number: G01L21/30 G01L21/34 H01J41/06

    Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).

    Abstract translation: 电离真空测量池具有:a)具有用于要测量的真空的测量连接(8)的可抽空壳体(10),b)第一外部和第二内部电极(3,4),其同轴地布置在 与公共轴(7)间隔开,由此在两个电极之间形成测量室(20),测量室与测量连接(8)连通,c)电压源(16),其连接到电极 (3,4),d)用于分析在所述电极(3,4)之间产生的放电电流的电流测量机构(17),以及e)至少一个围绕所述同轴电极(3)的永磁体环(1) 4)布置具有径向指向轴线的磁化方向(13),并且具有围绕永磁体环(1)的软磁轭(2)。

    IONIZATION VACUUM MEASURING CELL
    2.
    发明申请
    IONIZATION VACUUM MEASURING CELL 有权
    离子真空测量细胞

    公开(公告)号:US20140176150A1

    公开(公告)日:2014-06-26

    申请号:US14237007

    申请日:2012-08-02

    CPC classification number: G01L21/30 G01L21/34 H01J41/06

    Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).

    Abstract translation: 电离真空测量池具有:a)具有用于要测量的真空的测量连接(8)的可抽空壳体(10),b)第一外部和第二内部电极(3,4),其同轴地布置在 与公共轴(7)间隔开,由此在两个电极之间形成测量室(20),测量室与测量连接(8)连通,c)电压源(16),其连接到电极 (3,4),d)用于分析在所述电极(3,4)之间产生的放电电流的电流测量机构(17),以及e)至少一个围绕所述同轴电极(3)的永磁体环(1) 4)布置具有径向指向轴线的磁化方向(13),并且具有围绕永磁体环(1)的软磁轭(2)。

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