公开(公告)号：US5757474A

公开(公告)日：1998-05-26

申请号：US496061

申请日：1995-06-28

申请人： Bhushan L. Sopori ,  Larry C. Allen ,  Craig Marshall ,  Robert C. Murphy ,  Todd Marshall

发明人： Bhushan L. Sopori ,  Larry C. Allen ,  Craig Marshall ,  Robert C. Murphy ,  Todd Marshall

IPC分类号： G01N21/95 ,  G01N21/88

CPC分类号： G01N21/9505 ,  G01N21/9501

摘要： A method and apparatus for measuring characteristics of a piece of material, typically semiconductor materials including photovoltaic devices. The characteristics may include dislocation defect density, grain boundaries, reflectance, external LBIC, internal LBIC, and minority carrier diffusion length. The apparatus includes a light source, an integrating sphere, and a detector communicating with a computer. The measurement or calculation of the characteristics is calibrated to provide accurate, absolute values. The calibration is performed by substituting a standard sample for the piece of material, the sample having a known quantity of one or more of the relevant characteristics. The quantity measured by the system of the relevant characteristic is compared to the known quantity and a calibration constant is created thereby.

摘要翻译： 一种用于测量一块材料（通常包括光伏器件的半导体材料）的特性的方法和装置。 特征可能包括位错缺陷密度，晶界，反射率，外部LBIC，内部LBIC和少数载流子扩散长度。 该装置包括光源，积分球和与计算机通信的检测器。 校准特征的测量或计算以提供准确的绝对值。 通过用标准样品代替材料进行校准，样品具有已知量的一种或多种相关特征。 将相关特性的系统测量的量与已知量进行比较，由此产生校准常数。