公开(公告)号：US08585790B2

公开(公告)日：2013-11-19

申请号：US12761334

申请日：2010-04-15

申请人： Boguslaw A Swedek ,  Dominic J Benvegnu

发明人： Boguslaw A Swedek ,  Dominic J Benvegnu

IPC分类号： B29C39/00 ,  B29C59/00

CPC分类号： B24B37/205 ,  B24D18/0009

摘要： A window of solid light-transmissive polymer is formed in a polishing pad, and at least one surface of the window is treated to increase the smoothness of the at least one surface. Treating the surface of the window can include heating the at least one surface and pressing with a solid rigid part.

摘要翻译： 在抛光垫中形成固体透光聚合物的窗口，并且处理窗口的至少一个表面以增加至少一个表面的平滑度。 处理窗口的表面可以包括加热至少一个表面并用固体刚性部分进行加压。

公开(公告)号：US08393940B2

公开(公告)日：2013-03-12

申请号：US12762175

申请日：2010-04-16

申请人： Boguslaw A Swedek ,  Doyle E Bennett ,  Dominic J Benvegnu

发明人： Boguslaw A Swedek ,  Doyle E Bennett ,  Dominic J Benvegnu

IPC分类号： B24D11/00

CPC分类号： B24B37/205

摘要： A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.

摘要翻译： 抛光垫包括具有抛光表面的抛光层，与抛光层相对的抛光层一侧的粘合剂层，以及延伸穿过模制到抛光层的固体透光窗。 固体透光窗具有具有第一横向尺寸的上部和具有小于第一横向尺寸的第二横向尺寸的下部。 固体透光窗的顶表面与抛光表面共面并且固体透光窗的底表面与粘合剂层的下表面共面。