COMPOSITIONS AND METHODS FOR FORMING METAL ORGANIC FRAMEWORK (MOF) FILMS AND RELATED MICROELECTRONIC DEVICES

    公开(公告)号:US20250115770A1

    公开(公告)日:2025-04-10

    申请号:US18912542

    申请日:2024-10-10

    Abstract: Materials that are processable as spin coated films with a refractive index of less than about 1.25 are presented. These compositions include metal organic frameworks in a solvent system, with the MOFs including a metal or metal cluster (e.g., zirconium oxide) having organic linkers (e.g., maleic acid, benzene dicarboxylic acid) and optional endcaps to alter pore size, compositional stability, steric, and other properties of the material. The formed films are processable at low temperatures, thus allowing them to be processed on plastics. The provided materials find use in, for example, silicon photonics, augmented reality applications, virtual reality (VR) applications, CMOS image sensors, and micro-OLED applications.

Patent Agency Ranking