公开(公告)号：US20200002104A1

公开(公告)日：2020-01-02

申请号：US16426983

申请日：2019-05-30

Applicant: Brooks Automation, Inc.

Inventor： Christopher A. Bussiere ,  Robert T. Caveney

IPC: B65G47/90

Abstract: A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.

公开(公告)号：US11574830B2

公开(公告)日：2023-02-07

申请号：US16354954

申请日：2019-03-15

Applicant: Brooks Automation, Inc.

Inventor： Christopher A. Bussiere ,  Blake R Tashjian

IPC: B25J9/16 ,  H01L21/677 ,  B25J9/04 ,  B25J9/10 ,  H01L21/67

Abstract: A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.

公开(公告)号：US11535460B2

公开(公告)日：2022-12-27

申请号：US16426983

申请日：2019-05-30

Applicant: Brooks Automation, Inc.

Inventor： Christopher A. Bussiere ,  Robert T. Caveney

IPC: B65G47/90 ,  B25J9/04 ,  H01L21/677 ,  H01L21/687

Abstract: A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.