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公开(公告)号:US20190120528A1
公开(公告)日:2019-04-25
申请号:US16221954
申请日:2018-12-17
Applicant: Brooks Automation, Inc.
Inventor: Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
Abstract: A heat exchanger within an insulated enclosure receives primary refrigerant at a high pressure and cools the primary refrigerant using a secondary refrigerant from a secondary refrigeration system. An expansion unit within the insulated enclosure receives the primary refrigerant at the high pressure from the heat exchanger and discharges the primary refrigerant at a low pressure. A supply line delivers the primary refrigerant at the low pressure to the load and a return line returns the primary refrigerant from the load to the primary refrigeration system. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.