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公开(公告)号：US09687753B2
公开(公告)日：2017-06-27
申请号：US13753093
申请日：2013-01-29
Applicant: Brooks Automation, Inc.
Inventor： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Sergei Syssoev
Abstract: A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
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Patent Agency Ranking
公开(公告)号：US20160146200A1
公开(公告)日：2016-05-26
申请号：US15012399
申请日：2016-02-01
Applicant: Brooks Automation, Inc.
Inventor： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, JR.
IPC: F04B37/08
CPC classification number: F04B37/08 , B01D8/00 , Y10T29/49236
Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
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公开(公告)号：US20190120528A1
公开(公告)日：2019-04-25
申请号：US16221954
申请日：2018-12-17
Applicant: Brooks Automation, Inc.
Inventor： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
Abstract: A heat exchanger within an insulated enclosure receives primary refrigerant at a high pressure and cools the primary refrigerant using a secondary refrigerant from a secondary refrigeration system. An expansion unit within the insulated enclosure receives the primary refrigerant at the high pressure from the heat exchanger and discharges the primary refrigerant at a low pressure. A supply line delivers the primary refrigerant at the low pressure to the load and a return line returns the primary refrigerant from the load to the primary refrigeration system. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
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公开(公告)号：US20170306939A1
公开(公告)日：2017-10-26
申请号：US15633100
申请日：2017-06-26
Applicant: Brooks Automation, Inc.
Inventor： Allen J. Bartlett , Michael J. Eacobacci, JR. , Sergei Syssoev
Abstract: A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
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公开(公告)号：US09926919B2
公开(公告)日：2018-03-27
申请号：US15012399
申请日：2016-02-01
Applicant: Brooks Automation, Inc.
Inventor： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
CPC classification number: F04B37/08 , B01D8/00 , Y10T29/49236
Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
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公开(公告)号：US20130205805A1
公开(公告)日：2013-08-15
申请号：US13753093
申请日：2013-01-29
Applicant: Brooks Automation, Inc.
Inventor： Allen J. Bartlett , Michael J. Eacobacci, JR. , Sergei Syssoev
IPC: B01D8/00
Abstract: A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
Abstract translation: 冰箱系统或低温泵包括具有至少第一和第二级的第一冰箱和第二冰箱。 限制第一冰箱的第一级与第二冰箱的冷端之间的热耦合，以保持第二冰箱的冷端和第一冰箱的第一级之间的温差。 冰箱系统或低温泵还包括与第二冰箱的冷端热接触的辐射屏蔽，以及与辐射屏蔽隔开并被辐射屏蔽围绕的冷凝表面，并与第二级（例如最冷阶段）热接触， 的第一台冰箱。 受限制的热耦合可以被配置为平衡两个冰箱上的冷却负载。
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