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公开(公告)号：US20190063807A1
公开(公告)日：2019-02-28
申请号：US16173623
申请日：2018-10-29
发明人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
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2.发明申请公开(公告)号：US20160069339A1
公开(公告)日：2016-03-10
申请号：US14852365
申请日：2015-09-11
CPC分类号： F04B37/08 , B01D8/00 , F04B37/085
摘要： Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.
摘要翻译： 使用用于温度控制的薄层加热元件或作为加热器来改进冷冻组件。 这些加热元件可以被定位并且在再生期间防止汇集。 也可以通过使用陶瓷加热元件来实现温度控制。 陶瓷加热元件还可包括低温泵内结构支撑的第二功能。 可以通过辐射屏蔽进一步实现温度控制，其中辐射屏蔽包括包层片或涂层。
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