公开(公告)号：US07397039B2

公开(公告)日：2008-07-08

申请号：US11241794

申请日：2005-09-30

申请人： Bruce B. Baxter ,  Benyamin Buller ,  Wenwei Qiao ,  Huei-Mei Kao

发明人： Bruce B. Baxter ,  Benyamin Buller ,  Wenwei Qiao ,  Huei-Mei Kao

IPC分类号： G01B11/02

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J2237/20292 ,  H01J2237/2826 ,  H01J2237/30438 ,  H01J2237/31793

摘要： Improved systems, apparatus, and methods for detecting positions of moving stages and accurately compensating position error during operation (in “real time”) are provided. For some embodiments, rather than rely on two dimensional position measurements, measurements in at least three dimensions may be taken allowing compensation for pitch and roll and, therefore, more accurate position measurements. Further, by including a measurement of a beam column, compensation for movement of the beam may be performed.

摘要翻译： 提供了用于检测移动台的位置和在操作期间（“实时”）中精确地补偿位置误差的改进的系统，装置和方法。 对于一些实施例，不是依赖于二维位置测量，可以采取至少三维的测量，允许对俯仰和滚动进行补偿，并因此进行更准确的位置测量。 此外，通过包括光束列的测量，可以执行对光束的移动的补偿。

公开(公告)号：US20070085027A1

公开(公告)日：2007-04-19

申请号：US11241794

申请日：2005-09-30

申请人： Bruce Baxter ,  Benyamin Buller ,  Wenwei Qiao ,  Huei Kao

发明人： Bruce Baxter ,  Benyamin Buller ,  Wenwei Qiao ,  Huei Kao

IPC分类号： G01N23/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J2237/20292 ,  H01J2237/2826 ,  H01J2237/30438 ,  H01J2237/31793

摘要： Improved systems, apparatus, and methods for detecting positions of moving stages and accurately compensating position error during operation (in “real time”) are provided. For some embodiments, rather than rely on two dimensional position measurements, measurements in at least three dimensions may be taken allowing compensation for pitch and roll and, therefore, more accurate position measurements. Further, by including a measurement of a beam column, compensation for movement of the beam may be performed.

摘要翻译： 提供了用于检测移动台的位置和在操作期间（“实时”）中精确地补偿位置误差的改进的系统，装置和方法。 对于一些实施例，不是依赖于二维位置测量，可以采取至少三维的测量，允许对俯仰和滚动进行补偿，并因此进行更准确的位置测量。 此外，通过包括光束列的测量，可以执行对光束的移动的补偿。