-
1.发明申请Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权使用在峰值力攻丝模式下运行的AFM进行电气性能测量的方法和装置公开(公告)号：US20130276174A1
公开(公告)日：2013-10-17
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译： 一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。 优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。
-
2.发明申请公开(公告)号：US20160033547A1
公开(公告)日：2016-02-04
申请号：US14734942
申请日：2015-06-09
申请人： Bruker Nano, Inc.
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
-
3.发明授权Method and apparatus of physical property measurement using a probe-based nano-localized light source 有权使用基于探针的纳米局部光源进行物理性能测量的方法和装置公开(公告)号：US09052336B2
公开(公告)日：2015-06-09
申请号：US14532926
申请日：2014-11-04
申请人： Bruker Nano, Inc.
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译： 提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。 在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。 优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。
-
公开(公告)号：US09869694B2
公开(公告)日：2018-01-16
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
-
5.发明申请Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source 有权使用基于探针的纳米定位光源进行物理性能测量的方法和装置公开(公告)号：US20150067930A1
公开(公告)日：2015-03-05
申请号：US14532926
申请日：2014-11-04
申请人： Bruker Nano, Inc.
IPC分类号： G01Q10/00
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译： 提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。 在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。 优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。
-
6.发明授权Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权使用在峰值力攻丝模式下工作的AFM进行电气性能测量的方法和装置公开(公告)号：US09213047B2
公开(公告)日：2015-12-15
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译： 一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。 优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。
-
7.发明申请Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source 有权使用基于探针的纳米定位光源进行物理性能测量的方法和装置公开(公告)号：US20140259234A1
公开(公告)日：2014-09-11
申请号：US14202669
申请日：2014-03-10
申请人： Bruker Nano, Inc.
IPC分类号： G01Q10/00
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译： 提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。 在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。 优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。
-
公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
-
9.发明授权Method and apparatus of physical property measurement using a probe-based nano-localized light source 有权使用基于探针的纳米局部光源进行物理性能测量的方法和装置公开(公告)号：US08881311B2
公开(公告)日：2014-11-04
申请号：US14202669
申请日：2014-03-10
申请人： Bruker Nano, Inc.
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译： 提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。 在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。 优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.016 秒)
