公开(公告)号：US08018819B2

公开(公告)日：2011-09-13

申请号：US12117617

申请日：2008-05-08

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： G11B9/00

CPC分类号： H02K41/0356 ,  G11B9/1454

摘要： A microelectromechanical device that includes a fixed supporting body, at least one semiconductor body, which is movable with respect to the fixed supporting body, and at least one micromotor for moving the semiconductor body with respect to the fixed supporting body, the micromotor having at least one permanent magnet and a coil, which are coupled together and are movable with respect to one another. A ferromagnetic guide is coupled to the magnet and is shaped so as to concentrate lines of magnetic field generated by the magnet towards the coil.

摘要翻译： 一种微机电装置，其包括固定支撑体，至少一个半导体本体，其相对于固定支撑体可移动;以及至少一个微电机，用于相对于固定支撑体移动半导体本体，所述微电机至少具有 一个永磁体和线圈，它们联接在一起并且可相对于彼此移动。 铁磁引导件耦合到磁体并且被成形为将磁体产生的磁场线集中到线圈。

公开(公告)号：US08466599B2

公开(公告)日：2013-06-18

申请号：US12533850

申请日：2009-07-31

申请人： Ubaldo Mastromatteo ,  Bruno Murari ,  Giulio Ricotti ,  Marco Marchesi

发明人： Ubaldo Mastromatteo ,  Bruno Murari ,  Giulio Ricotti ,  Marco Marchesi

IPC分类号： H02N1/00

CPC分类号： H02N1/004

摘要： In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement.

摘要翻译： 在静电微电机中，移动基板面向固定的基板并且在操作的静止状态下以给定的分离距离悬挂在固定的基板上; 致动单元被构造成在致动的操作状态期间在移动方向上相对于固定基板产生相对移动。 致动单元还构造成使得移动基板和固定基板在操作的操作状态下基本接触并保持它们接触。 静电微电机设置有用于减少摩擦的电子单元，其被配置为在相对运动期间减小由转子基板和定子基板之间的接触产生的摩擦。

公开(公告)号：US20100026138A1

公开(公告)日：2010-02-04

申请号：US12533850

申请日：2009-07-31

申请人： Ubaldo Mastromatteo ,  Bruno Murari ,  Giulio Ricotti ,  Marco Marchesi

发明人： Ubaldo Mastromatteo ,  Bruno Murari ,  Giulio Ricotti ,  Marco Marchesi

IPC分类号： H02N11/00

CPC分类号： H02N1/004

摘要： In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement.

摘要翻译： 在静电微电机中，移动基板面向固定的基板并且在操作的静止状态下以给定的分离距离悬挂在固定的基板上; 致动单元被构造成在致动的操作状态期间在移动方向上相对于固定基板产生相对移动。 致动单元还构造成使得移动基板和固定基板在操作的操作状态下基本接触并保持它们接触。 静电微电机设置有用于减少摩擦的电子单元，其被配置为在相对运动期间减小由转子基板和定子基板之间的接触产生的摩擦。

公开(公告)号：US20100026137A1

公开(公告)日：2010-02-04

申请号：US12533835

申请日：2009-07-31

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： H02N11/00

CPC分类号： H02N1/004

摘要： In an electrostatic micromotor, a mobile substrate faces a fixed substrate, and electrostatic-interaction elements are provided to allow a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement. The electrostatic-interaction elements include electrodes arranged on a facing surface of the fixed substrate (2) facing the mobile substrate. The mobile substrate has indentations, which extend within the mobile substrate starting from a respective facing surface that faces the fixed substrate and define between them projections staggered with respect to the electrodes in the direction of movement. Side walls of the indentations have a first distance of separation at the respective facing surface, and a second distance of separation, greater than the first distance of separation, at an internal region of the indentations.

摘要翻译： 在静电微电机中，移动衬底面向固定衬底，并且提供静电相互作用元件以允许移动衬底相对于固定衬底在移动方向上的相对移动。 静电相互作用元件包括布置在面向移动基板的固定基板（2）的面对表面上的电极。 移动基板具有凹槽，其从移动基板的相对面朝向固定基板开始并且在它们之间限定在移动方向上相对于电极交错的凸起之间延伸的移动基板。 凹陷的侧壁在相应的相对表面处具有第一分离距离，并且在凹陷的内部区域处具有大于分离距离的第二距离。

公开(公告)号：US07898267B2

公开(公告)日：2011-03-01

申请号：US12573027

申请日：2009-10-02

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： H02N1/00 ,  G01R27/26

CPC分类号： H02N1/006

摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.

摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。

公开(公告)号：US20100019617A1

公开(公告)日：2010-01-28

申请号：US12573027

申请日：2009-10-02

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： H02N1/00 ,  H01L51/40

CPC分类号： H02N1/006

摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.

摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。

公开(公告)号：US08362674B2

公开(公告)日：2013-01-29

申请号：US12533835

申请日：2009-07-31

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： H02N1/00

CPC分类号： H02N1/004

摘要： In an electrostatic micromotor, a mobile substrate faces a fixed substrate, and electrostatic-interaction elements are provided to allow a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement. The electrostatic-interaction elements include electrodes arranged on a facing surface of the fixed substrate (2) facing the mobile substrate. The mobile substrate has indentations, which extend within the mobile substrate starting from a respective facing surface that faces the fixed substrate and define between them projections staggered with respect to the electrodes in the direction of movement. Side walls of the indentations have a first distance of separation at the respective facing surface, and a second distance of separation, greater than the first distance of separation, at an internal region of the indentations.

摘要翻译： 在静电微电机中，移动衬底面向固定衬底，并且提供静电相互作用元件以允许移动衬底相对于固定衬底在移动方向上的相对移动。 静电相互作用元件包括布置在面向移动基板的固定基板（2）的面对表面上的电极。 移动基板具有凹槽，其从移动基板的相对面朝向固定基板开始并且在它们之间限定在移动方向上相对于电极交错的凸起之间延伸的移动基板。 凹陷的侧壁在相应的相对表面处具有第一分离距离，并且在凹陷的内部区域处具有大于分离距离的第二距离。

公开(公告)号：US20110058465A1

公开(公告)日：2011-03-10

申请号：US12117617

申请日：2008-05-08

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Giulio Ricotti

IPC分类号： G11B9/00 ,  H02K41/035

CPC分类号： H02K41/0356 ,  G11B9/1454

摘要： A microelectromechanical device that includes a fixed supporting body, at least one semiconductor body, which is movable with respect to the fixed supporting body, and at least one micromotor for moving the semiconductor body with respect to the fixed supporting body, the micromotor having at least one permanent magnet and a coil, which are coupled together and are movable with respect to one another. A ferromagnetic guide is coupled to the magnet and is shaped so as to concentrate lines of magnetic field generated by the magnet towards the coil.

摘要翻译： 一种微机电装置，其包括固定支撑体，至少一个半导体本体，其相对于固定支撑体可移动;以及至少一个微电机，用于相对于固定支撑体移动半导体本体，所述微电机至少具有 一个永磁体和线圈，它们联接在一起并且可相对于彼此移动。 铁磁引导件耦合到磁体并且被成形为将磁体产生的磁场线集中到线圈。

公开(公告)号：US20050009300A1

公开(公告)日：2005-01-13

申请号：US10893021

申请日：2004-07-16

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Benedetto Vigna

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Benedetto Vigna

IPC分类号： H01L23/31 ,  H01L23/36 ,  H01L23/373 ,  H01L23/482 ,  H01L21/44

CPC分类号： H01L24/01 ,  H01L23/3157 ,  H01L23/36 ,  H01L23/3735 ,  H01L23/4827 ,  H01L2224/274 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01079 ,  H01L2924/01082

摘要： The electronic device is formed in a die including a body of semiconductor material having a first face covered by a covering structure and a second face. An integral thermal spreader of metal is grown galvanically on the second face during the manufacture of a wafer, prior to cutting into dice. The covering structure comprises a passivation region and a protective region of opaque polyimide; the protective region and the passivation region are opened above the contact pads for the passage of leads.

公开(公告)号：US5855693A

公开(公告)日：1999-01-05

申请号：US571806

申请日：1995-12-13

申请人： Bruno Murari ,  Flavio Villa ,  Ubaldo Mastromatteo

发明人： Bruno Murari ,  Flavio Villa ,  Ubaldo Mastromatteo

IPC分类号： H01L21/02 ,  H01L21/20 ,  H01L27/00 ,  H01L27/12 ,  H01L21/265

CPC分类号： H01L21/2007 ,  H01L2924/01006 ,  H01L2924/01019 ,  H01L2924/01074 ,  H01L2924/14

摘要： A wafer of semiconductor material for fabricating integrated devices, including a stack of superimposed layers including first and second monocrystalline silicon layers separated by an intermediate insulating layer made of a material selected from the group comprising silicon carbide, silicon nitride and ceramic materials. An oxide bond layer is provided between the intermediate layer and the second silicon layer. The wafer is fabricated by forming the intermediate insulating layer on the first silicon layer in a heated vacuum chamber; depositing the oxide layer; and superimposing the second silicon layer. When the stack of silicon, insulating material, oxide and silicon layers is heat treated, the oxide reacts so as to bond the insulating layer to the second silicon layer. As a ceramic material beryllium oxide, aluminium nitride, boron nitride and alumina may be used.

摘要翻译： 一种用于制造集成器件的半导体材料晶片，包括由包括由碳化硅，氮化硅和陶瓷材料组成的材料制成的中间绝缘层分隔的第一和第二单晶硅层的叠加层。 在中间层和第二硅层之间设置氧化物接合层。 通过在加热的真空室中在第一硅层上形成中间绝缘层来制造晶片; 沉积氧化层; 并叠加第二硅层。 当硅，绝缘材料，氧化物和硅层的堆叠被热处理时，氧化物反应以将绝缘层粘合到第二硅层。 作为陶瓷材料氧化铍，可以使用氮化铝，氮化硼和氧化铝。