公开(公告)号：US06822735B2

公开(公告)日：2004-11-23

申请号：US10298982

申请日：2002-11-18

申请人： Byoung-Sam Kim ,  Young-Min Baik ,  Mi-Kyung Lee ,  Hyung-Min Lee

发明人： Byoung-Sam Kim ,  Young-Min Baik ,  Mi-Kyung Lee ,  Hyung-Min Lee

IPC分类号： G01N2100

CPC分类号： G01N21/958

摘要： Enclosed is an apparatus for analyzing micro-bubbles inside a high-purity glass tube by using a laser light dispersion. The apparatus includes: an optical base having a sample stage in a substantially horizontal orientation; a glass tube rotably mounted on the optical base in a substantially vertical orientation, the glass tube being rotated and translated in a vertical direction at a predetermined speed via the sample stage; a light generator disposed at one side of the glass tube for selectively irradiating a laser light onto an outer surface of the glass tube at a prefixed angle; and, a detector disposed at the other side of the glass tube for detecting the distribution and amount of micro-bubbles of the glass tube using the laser light passed through the glass tube.

摘要翻译： 封闭的是通过使用激光分散体来分析高纯度玻璃管内的微气泡的装置。 该装置包括：具有大致水平取向的样品台的光学基座; 玻璃管以大致垂直的方向可旋转地安装在光学基座上，玻璃管经由样品台以预定速度在垂直方向上旋转和平移; 设置在所述玻璃管的一侧的光发生器，用于以预定角度选择性地将激光照射到所述玻璃管的外表面上; 以及检测器，设置在玻璃管的另一侧，用于检测使用穿过玻璃管的激光的玻璃管的微气泡的分布和数量。