公开(公告)号：US3866042A

公开(公告)日：1975-02-11

申请号：US37992573

申请日：1973-07-17

Applicant: CAMECA

Inventor： VASTEL JEAN

IPC: G01N27/62 ,  G01Q60/00 ,  H01J49/28 ,  H01J49/32 ,  H01J39/34 ,  H01J37/26

CPC classification number: H01J49/28 ,  H01J49/286 ,  H01J49/324

Abstract: A microanalyser operating by secondary ion emission and comprising a double magnetic-prism for deflecting the ions according to their ''''momentum-to-charge'''' ratio and electrostatic means for filtering the ions according to their ''''energy-tocharge'''' ratio. An element is provided to operate either as an electrostatic mirror allowing the production of images through ion microscopy or as a transmitting and filtering device incorporated in the make-up of a double-focussing mass spectrometer in accordance with the magnetic prism and an electrostatic condenser.

Abstract translation: 通过二次离子发射操作的微型分析仪，包括用于根据“动量与电荷”比率偏转离子的双重磁性棱镜，以及根据其“能量 - 电荷”比对过滤离子的静电装置。 提供元件以作为静电镜来操作，其允许通过离子显微镜产生图像，或作为根据磁性棱镜和静电冷凝器结合在双重聚焦质谱仪的组合中的透射和滤波装置。