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    Separated ion beam source with adjustable separation
    1.
    发明授权
    Separated ion beam source with adjustable separation 失效
    分离离子束源可调节分离

    公开(公告)号：US3649862A

    公开(公告)日：1972-03-14

    申请号：US3649862D

    申请日：1969-05-01

    Applicant: COLUTRON CORP

    Inventor： WAHLIN LARS E

    IPC: G21K1/08 ,  H01J27/02 ,  H01J49/28 ,  H05H5/00

    CPC classification number: H01J27/02 ,  G21K1/08 ,  H01J49/286

    Abstract: An ion beam source includes an ion source, ion accelerator and focusing system, and a velocity filter with a deflection plate pair. The velocity filter provides for dispersion of ions according to their charge, mass and velocity. The ion source includes a nonconducting barrel, a filament mounted in the barrel and an anode enclosing the barrel opening except for a source aperture. Filament current is arranged to provide an electron current to the anode, this electron current ionizes the charge material thus forming a plasma cloud for ejecting into the focusing and lens system, and then into a velocity filter causing separation of ion beam.

    Abstract translation: 离子束源包括离子源，离子加速器和聚焦系统以及具有偏转板对的速度滤波器。 速度滤波器根据其电荷，质量和速度提供离子的分散。 离子源包括不导电筒，安装在镜筒中的灯丝和除了源孔以外包围镜筒开口的阳极。 灯丝电流被布置为向阳极提供电子电流，该电子电流使电荷材料电离，从而形成等离子体云，用于喷射到聚焦透镜系统中，然后进入导致离子束分离的速度滤光器。

    APPARATUS FOR MASS ANALYSIS OF ANALYTES BY SIMULTANEOUS POSITIVE AND NEGATIVE IONIZATION
    2.
    发明申请
    APPARATUS FOR MASS ANALYSIS OF ANALYTES BY SIMULTANEOUS POSITIVE AND NEGATIVE IONIZATION 审中-公开

    公开(公告)号：US20190115201A1

    公开(公告)日：2019-04-18

    申请号：US16214566

    申请日：2018-12-10

    Applicant: MERIDION, LLC

    Inventor： Nicholas WILTON

    IPC: H01J49/28 ,  H01J49/32 ,  H01J49/22 ,  H01J49/14 ,  H01J49/00 ,  H01J49/04

    CPC classification number: H01J49/286 ,  H01J49/0027 ,  H01J49/0422 ,  H01J49/147 ,  H01J49/22 ,  H01J49/328

    Abstract: Among other things, we describe methods and apparatus for the ionization of target molecular analytes of interest, e.g., for use in mass spectrometry. In some implementations, a thin molecular stream is emitted in either single or a split mode and encounters both an electron-impact ion source and trochoidal electron monochromator placed sequentially or coincidentally. The first ion source emits high-energy electrons (˜70 eV) to generate characteristic positively-charged mass fragment spectra while the second source emits low-energy electrons in a narrow bandwidth to generate negative molecular ions or other ions via electron capture ionization. The dual ion source may be coupled to analytical instruments such as a gas chromatograph and to any number of mass analyzers such as a polarity switching quadrupole mass analyzer or to multiple mass analyzers.

    Apparatus and method for maskless ion implantation
    3.
    发明授权
    Apparatus and method for maskless ion implantation 失效
    无掩模离子注入的装置和方法

    公开(公告)号：US4074139A

    公开(公告)日：1978-02-14

    申请号：US754685

    申请日：1976-12-27

    Applicant: Jacques I. Pankove

    Inventor： Jacques I. Pankove

    IPC: H01J37/317 ,  H01J49/28 ,  H01J37/30 ,  H01L21/265 ,  H01L21/72

    CPC classification number: H01J49/286 ,  H01J37/3172

    Abstract: A method and apparatus for implanting dopant material into a substrate of semiconductive material in a preselected pattern without utilizing a mask comprises the use of a source template which is formed of the desired dopant material in the configuration of the pattern to be implanted. Ions of the dopant material are sputtered from the template by bombardment with an ionized gas, and these dopant ions are then filtered from unwanted ion species and accelerated into the substrate while remaining in the original template pattern.

    Abstract translation: 在不利用掩模的情况下，以预选图案将掺杂剂材料注入到半导体材料的衬底中的方法和装置包括在待植入图案的配置中使用由所需掺杂剂材料形成的源模板。 掺杂剂材料的离子通过用电离气体轰击从模板溅射，然后将这些掺杂剂离子从不需要的离子物质中过滤并加速到衬底中，同时保留在原始模板图案中。

    IMR-MS device
    7.
    发明授权
    IMR-MS device 有权

    公开(公告)号：US10074531B2

    公开(公告)日：2018-09-11

    申请号：US15782281

    申请日：2017-10-12

    Applicant: IONICON ANALYTIK GESELLSCHAFT M.B.H.

    Inventor： Philipp Sulzer ,  Simone Jürschik ,  Jens Herbig ,  Alfons Jordan ,  Lukas Märk

    IPC: H01J49/16 ,  H01J49/00 ,  H01J49/14 ,  H01J49/28 ,  H01J49/42

    CPC classification number: H01J49/168 ,  H01J49/0009 ,  H01J49/0027 ,  H01J49/145 ,  H01J49/286 ,  H01J49/426

    Abstract: Ion-molecule-reaction—mass spectrometry (IMR-MS) device, comprising an ion source, an adjacent reaction chamber and a mass spectrometer subsequent to the reaction chamber, wherein the reaction chamber comprises an RF device for creating a temporally changing electromagnetic field and wherein an adjustable reduced electric field strength (E/N) can be applied to the reaction chamber, characterized by an input device for entering a desired reduced electric field strength (E/N) by an operator when operating said IMR-MS device for analyzing a sample, and a controlling device that operates the IMR-MS device by adjusting the settings of the IMR-MS device relating to a defined data set of a pseudo reduced electric field strength (PE/N1,2) for the entered reduced electric field strength (E/N), wherein the pseudo reduced electric field strength (PE/N1,2) has been determined by analyzing a first analyte (A1) in the IMR-MS device, wherein intensity signals (RS1) of at least two product ions of the analyte (A1) are recorded and wherein the settings of the IMR-MS device are changed until the measured intensity signal (IS1) ratios of the at least two product ions match reference intensity signal (RS1) ratios within a given tolerance level of the at least two product ions determined in an IMR-MS device comprising an ion source, an adjacent reaction chamber with a DC-drift tube and a mass spectrometer subsequent to the reaction chamber, wherein the reaction chamber is operated only with an activated DC-drift tube at a certain actual reduced electric field strength (Ea1/N), wherein these settings of the IMR-MS device relating to the pseudo reduced electric field strength (PE/N1) are stored in the controlling device, wherein the controlling device controls said IMR-MS device by performing analysis of the sample with the settings corresponding to the pseudo reduced electric field strengths (PE/N1).

    Microanalyser convertible into a mass spectrometer
    8.
    发明授权
    Microanalyser convertible into a mass spectrometer 失效
    微量元素可转换成质谱仪

    公开(公告)号：US3866042A

    公开(公告)日：1975-02-11

    申请号：US37992573

    申请日：1973-07-17

    Applicant: CAMECA

    Inventor： VASTEL JEAN

    IPC: G01N27/62 ,  G01Q60/00 ,  H01J49/28 ,  H01J49/32 ,  H01J39/34 ,  H01J37/26

    CPC classification number: H01J49/28 ,  H01J49/286 ,  H01J49/324

    Abstract: A microanalyser operating by secondary ion emission and comprising a double magnetic-prism for deflecting the ions according to their ''''momentum-to-charge'''' ratio and electrostatic means for filtering the ions according to their ''''energy-tocharge'''' ratio. An element is provided to operate either as an electrostatic mirror allowing the production of images through ion microscopy or as a transmitting and filtering device incorporated in the make-up of a double-focussing mass spectrometer in accordance with the magnetic prism and an electrostatic condenser.

    Abstract translation: 通过二次离子发射操作的微型分析仪，包括用于根据“动量与电荷”比率偏转离子的双重磁性棱镜，以及根据其“能量 - 电荷”比对过滤离子的静电装置。 提供元件以作为静电镜来操作，其允许通过离子显微镜产生图像，或作为根据磁性棱镜和静电冷凝器结合在双重聚焦质谱仪的组合中的透射和滤波装置。

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