公开(公告)号：US20140336978A1

公开(公告)日：2014-11-13

申请号：US14269695

申请日：2014-05-05

申请人： CANON KABUSHIKI KAISHA

发明人： Yutaka NIWAYAMA ,  Hiroyuki YUKI

IPC分类号： G01B21/16

CPC分类号： G05B19/401 ,  G05B19/40937 ,  G05B2219/37223 ,  G05B2219/37451 ,  G05B2219/49372 ,  Y02P90/265

摘要： Provided is a method for determining a placement of a moving body that moves to face an object and perform a process at a plurality of target points on the object. The method includes the following steps executed by a processor: a step of setting candidates regarding the placement of the moving body for each of the plurality of target points; a step of obtaining a processable area, which is capable of being processed by the moving body in the object, corresponding to each of the set candidates; and a step of determining the candidate corresponding to a combination of the processable areas as the placement of the moving body by obtaining the combination of the processable areas satisfying the plurality of target points from among the obtained plurality of processable areas.

摘要翻译： 提供了一种用于确定移动到面对物体并且在物体上的多个目标点处执行处理的移动体的放置的方法。 该方法包括由处理器执行的以下步骤：设置关于多个目标点中的每一个的移动体的放置的候选的步骤; 对应于每个所述候选项，获得能够被所述物体中的移动体处理的可处理区域的步骤; 以及通过从所获得的多个可处理区域中获得满足多个目标点的可处理区域的组合，确定与可处理区域的组合相对应的候选作为移动体的放置的步骤。

公开(公告)号：US20140300904A1

公开(公告)日：2014-10-09

申请号：US14242949

申请日：2014-04-02

申请人： CANON KABUSHIKI KAISHA

发明人： Hiroyuki YUKI

IPC分类号： G01B9/02 ,  G01B11/14

CPC分类号： G01B9/02015 ,  G01B9/02042 ,  G01B9/02044

摘要： The present invention provides a measurement apparatus including a first optical system configured to allow a first test light to pass, and a second optical system configured to allow a second test light to pass, wherein an optical power in the first optical system and an optical power in the second optical system are different, a distance between a focal point of the first test light on a side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the first test light, and a distance between a focal point of the second test light on the side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the second test light.

摘要翻译： 本发明提供了一种测量装置，包括配置为允许第一测试光通过的第一光学系统和被配置为允许第二测试光通过的第二光学系统，其中第一光学系统中的光功率和光功率 在第二光学系统中，第一测试光的焦点与要测量的表面之间的距离根据第一测试光的多个波长中的每一个而变化， 并且待测量表面侧的第二测试光的焦点与被测量表面之间的距离根据第二测试光的多个波长中的每一个而变化。