专利检索 ap:("CANON KABUSHIKI KAISHA") AND inv:"KENJI YAEGASHI" 第 1 页

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发明公开
OBJECT ALIGNMENT METHOD, IMPRINT METHOD, ARTICLE MANUFACTURING METHOD, DETECTION APPARATUS, IMPRINT APPARATUS, MOLD, AND SUBSTRATE 审中-公开

公开(公告)号：US20230294351A1

公开(公告)日：2023-09-21

申请号：US18180610

申请日：2023-03-08

申请人： CANON KABUSHIKI KAISHA

发明人： KENJI YAEGASHI

IPC分类号： B29C59/02 , G03F7/00 , B29C59/00

CPC分类号： B29C59/022 , G03F7/0002 , B29C59/026 , B29C59/002

摘要： An alignment method of aligning a first object and a second object includes detecting a moire fringe formed by a mark of the first object and a mark of the second object by using a detection unit, detecting an evaluation mark for correcting a detection result of the moire fringe, by the detection unit, and acquiring a detection result of the evaluation mark, determining a relative position of the mark of the first object and the mark of the second object by correcting a detection result of the moire fringe by use of the detection result of the evaluation mark, and aligning the first object and the second object based on the relative position. The evaluation mark is provided in at least one of the first object and the second object.