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公开(公告)号：US20150286149A1
公开(公告)日：2015-10-08
申请号：US14670490
申请日：2015-03-27
发明人： Nozomu Izumi , Kouhei Nagano
IPC分类号： G03F7/20
CPC分类号： G03F9/70 , G03F7/70141 , G03F9/7088
摘要： An exposure apparatus comprises a first detector detecting substrate-side marks via an original-side mark and a projection optical system; second detectors arranged in a larger number than the first detector and detecting the substrate-side marks not via the projection optical system; a reference plate having reference marks; and a control unit configured to obtain a first detection result of the plurality of reference marks by the second detectors, obtain first information relating to a first distance between the plurality of second detectors based on the first detection result, obtain a second detection result of the identical substrate-side mark by the first detector and the second detectors, obtain second information relating to a second distance between the first detector and the second detectors based on the second detection result, and control the alignment of the original and the substrate based on the first information and the second information.
摘要翻译： 曝光装置包括：第一检测器，经由原边标记和投影光学系统检测基板侧标记; 第二检测器布置成比第一检测器多的数量，并且不经由投影光学系统检测基板侧标记; 具有参考标记的参考板; 以及控制单元，被配置为通过所述第二检测器获得所述多个参考标记的第一检测结果，基于所述第一检测结果获得与所述多个第二检测器之间的第一距离有关的第一信息，获得所述第二检测结果 通过第一检测器和第二检测器相同的基板侧标记，基于第二检测结果获得与第一检测器和第二检测器之间的第二距离有关的第二信息，并基于第二检测器控制原稿和基板的对准 第一信息和第二信息。
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公开(公告)号：US08513038B2
公开(公告)日：2013-08-20
申请号：US13681879
申请日：2012-11-20
发明人： Takashi Moriyama , Nozomu Izumi , Taro Endo , Tomoyuki Hiroki , Satoru Shiobara , Nobuhiko Sato
CPC分类号： H01L51/0002 , H01L51/0018 , H01L51/5012
摘要： A method of manufacturing an organic electroluminescent device includes a step of forming a masking layer and an intermediate layer on a first organic compound layer such that the masking layer and the intermediate layer have a predetermined pattern, a step of patterning the first organic compound layer using the masking layer and the intermediate layer, a step of forming a second organic compound layer, and a step of removing the intermediate layer and the second organic compound layer formed thereon in such a manner that the intermediate layer is contacted with a dissolving liquid for dissolving the intermediate layer. In the method, the first and second organic compound layers are protected by covering the first and second organic compound layers with a sacrificial layer until the patterning of the first and second organic compound layers is completed.
摘要翻译： 制造有机电致发光器件的方法包括在第一有机化合物层上形成掩模层和中间层以使掩模层和中间层具有预定图案的步骤，使用第一有机化合物层图案化步骤 掩模层和中间层，形成第二有机化合物层的步骤，以及使中间层与溶解液接触的方式除去形成在其上的中间层和第二有机化合物层的步骤 中间层。 在该方法中，通过用牺牲层覆盖第一和第二有机化合物层来保护第一和第二有机化合物层，直到第一和第二有机化合物层的图案化完成。
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公开(公告)号：US09285691B2
公开(公告)日：2016-03-15
申请号：US14670490
申请日：2015-03-27
发明人： Nozomu Izumi , Kouhei Nagano
CPC分类号： G03F9/70 , G03F7/70141 , G03F9/7088
摘要： An exposure apparatus comprises a first detector detecting substrate-side marks via an original-side mark and a projection optical system; second detectors arranged in a larger number than the first detector and detecting the substrate-side marks not via the projection optical system; a reference plate having reference marks; and a control unit configured to obtain a first detection result of the plurality of reference marks by the second detectors, obtain first information relating to a first distance between the plurality of second detectors based on the first detection result, obtain a second detection result of the identical substrate-side mark by the first detector and the second detectors, obtain second information relating to a second distance between the first detector and the second detectors based on the second detection result, and control the alignment of the original and the substrate based on the first information and the second information.
摘要翻译： 曝光装置包括：第一检测器，经由原边标记和投影光学系统检测基板侧标记; 第二检测器布置成比第一检测器多的数量，并且不经由投影光学系统检测基板侧标记; 具有参考标记的参考板; 以及控制单元，被配置为通过所述第二检测器获得所述多个参考标记的第一检测结果，基于所述第一检测结果获得与所述多个第二检测器之间的第一距离有关的第一信息，获得所述第二检测结果 通过第一检测器和第二检测器相同的基板侧标记，基于第二检测结果获得与第一检测器和第二检测器之间的第二距离有关的第二信息，并基于第二检测器控制原稿和基板的对准 第一信息和第二信息。
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公开(公告)号：US20130137205A1
公开(公告)日：2013-05-30
申请号：US13681879
申请日：2012-11-20
发明人： Takashi Moriyama , Nozomu Izumi , Taro Endo , Tomoyuki Hiroki , Satoru Shiobara , Nobuhiko Sato
IPC分类号： H01L51/00
CPC分类号： H01L51/0002 , H01L51/0018 , H01L51/5012
摘要： A method of manufacturing an organic electroluminescent device includes a step of forming a masking layer and an intermediate layer on a first organic compound layer such that the masking layer and the intermediate layer have a predetermined pattern, a step of patterning the first organic compound layer using the masking layer and the intermediate layer, a step of forming a second organic compound layer, and a step of removing the intermediate layer and the second organic compound layer formed thereon in such a manner that the intermediate layer is contacted with a dissolving liquid for dissolving the intermediate layer. In the method, the first and second organic compound layers are protected by covering the first and second organic compound layers with a sacrificial layer until the patterning of the first and second organic compound layers is completed.
摘要翻译： 制造有机电致发光器件的方法包括在第一有机化合物层上形成掩模层和中间层以使掩模层和中间层具有预定图案的步骤，使用第一有机化合物层图案化步骤 掩模层和中间层，形成第二有机化合物层的步骤，以及使中间层与溶解液接触的方式除去形成在其上的中间层和第二有机化合物层的步骤 中间层。 在该方法中，通过用牺牲层覆盖第一和第二有机化合物层来保护第一和第二有机化合物层，直到第一和第二有机化合物层的图案化完成。
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