CONTROL-ELECTRODE SHIELDING FOR IMPROVED LINEARITY OF A MEMS DVC DEVICE
    2.
    发明申请
    CONTROL-ELECTRODE SHIELDING FOR IMPROVED LINEARITY OF A MEMS DVC DEVICE 有权
    用于改进MEMS DVC器件的线性的控制电极屏蔽

    公开(公告)号:US20160055979A1

    公开(公告)日:2016-02-25

    申请号:US14779564

    申请日:2014-04-02

    CPC classification number: H01G5/011 H01G5/013 H01G5/16 H01G5/18 H01H59/0009

    Abstract: The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

    Abstract translation: 本发明一般涉及一种具有在RF电极和一个或多个其它电极之间的屏蔽电极结构的MEMS DVC,其使得板移动。 屏蔽电极结构可以接地,并且基本上阻挡或屏蔽RF电极与使板移动的一个或多个电极。 通过屏蔽RF电极,RF电极与导致板移动的一个或多个电极的耦合减小,电容调制减小甚至消除。

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