Method of manufacturing a MEMS DVC device

    公开(公告)号:US10403442B2

    公开(公告)日:2019-09-03

    申请号:US15629161

    申请日:2017-06-21

    摘要: The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.