Temperature control system, temperature control method and image sensor-testing apparatus having the system

    公开(公告)号:US20230098042A1

    公开(公告)日:2023-03-30

    申请号:US17931148

    申请日:2022-09-12

    申请人: CHROMA ATE INC.

    IPC分类号: G01R31/28

    摘要: The present invention relates to a temperature control system, a temperature control method and an image sensor-testing apparatus having the system. The temperature control method mainly comprises the steps of regulating the temperatures of a plurality of devices under test (DUTs) to a specific temperature in a temperature control zone; transferring the plurality of devices under test to a test plate and placing them into a plurality of test slots respectively; and measuring the temperatures of the device under test by the temperature-sensing elements in the test slots, wherein when at least one temperature-sensing element of the temperature-sensing elements detects that the device under test in the test slot corresponding to said at least one temperature-sensing element fails to meet the specific temperature, a temperature control element corresponding to the test slot regulates the temperature of the device under test.