公开(公告)号：US20180140967A1

公开(公告)日：2018-05-24

申请号：US15573080

申请日：2016-03-04

Applicant: CHUGAI RO CO., LTD.

Inventor： Junya TANAKA ,  Masamichi YAMAMURA ,  Kunihiro KITAHASHI

IPC: B01D5/00 ,  B01D1/14 ,  B01D1/00 ,  C01B19/02

CPC classification number: B01D5/006 ,  B01D1/00 ,  B01D1/0011 ,  B01D1/0082 ,  B01D1/14 ,  B01D3/10 ,  B01D5/00 ,  B01D5/0012 ,  C01B19/02

Abstract: A vapor circulation regeneration system is provided for utilizing a vapor by circulation and regeneration. The system includes at least: a liquefaction regeneration unit including a liquefaction space where the vapor of an object to be heated is liquefied and a heating part for maintaining a liquid-like state; a vaporization unit for heating the liquid-like material by means of a heating part so as to generate a vapor; a fluid communication part for establishing fluid communication between the liquefaction regeneration unit and the vaporization unit; a processing unit for processing an object to be processed by using the vapor; a return pipe for returning the vapor used in the processing unit to the liquefaction regeneration unit; a liquefaction regeneration temperature control part for controlling the temperature of the liquefaction regeneration unit; and a vaporization temperature control part for controlling the temperature of the vaporization unit. Then, the object to be heated is present in a solid state at ordinary temperatures, present in a vapor state and the liquid-like state in the liquefaction regeneration unit, present in the liquid-like state in the fluid communication part, present in the liquid-like state and the vapor state in the vaporization unit, and present in the vapor state in the processing unit and the return pipe.