公开(公告)号：US20120126472A1

公开(公告)日：2012-05-24

申请号：US13287328

申请日：2011-11-02

申请人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  WEN-CHIEH WU ,  WEI-TE LIU

发明人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  WEN-CHIEH WU ,  WEI-TE LIU

IPC分类号： B23Q3/18

CPC分类号： B24B37/30 ,  B24B41/061

摘要： The present invention relates to a sheet for mounting a workpiece, which includes a sheet body. The sheet body includes a top surface, a plurality of foamed pores, and a plurality of surface holes or at least one surface groove. The top surface is used for mounting a workpiece. The foamed pores are disposed in the interior of the sheet body. The surface holes or the surface groove have opening on the top surface but does not communicate with the foamed pores. The surface holes or the surface groove is formed by machining, and arranged in at least one pattern. Whereby, the time for taking off the workpiece from the sheet is reduced.

摘要翻译： 本发明涉及一种用于安装工件的片材，其包括片体。 片体包括顶表面，多个发泡孔，以及多个表面孔或至少一个表面凹槽。 顶面用于安装工件。 发泡孔设置在片体的内部。 表面孔或表面凹槽在顶表面上具有开口，但不与发泡孔连通。 表面孔或表面凹槽通过机械加工形成，并以至少一种图案布置。 从而减少了从片材中取出工件的时间。

公开(公告)号：US20120094584A1

公开(公告)日：2012-04-19

申请号：US13091438

申请日：2011-04-21

申请人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  CHUN-TA WANG ,  HSIN-RU SONG

发明人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  CHUN-TA WANG ,  HSIN-RU SONG

IPC分类号： B24B37/00 ,  F16J15/02

CPC分类号： B24B37/30

摘要： The present invention relates to a sheet for mounting a workpiece and a method for making the same. The method includes the steps of: (a) providing a sheet body having a top surface, a bottom surface, at least one side surface and a plurality of pores, wherein some of the pores open at the side surface; and (b) sealing or narrowing the pores that open at the side surface. Since the pores that open at the side surface are sealed or narrowed, the slurry is prevented from entering into the interior of the sheet body. Therefore, the infiltration distance reaches a predetermined value slowly, thereby increasing the effective life of the sheet.

摘要翻译： 本发明涉及一种用于安装工件的片材及其制造方法。 该方法包括以下步骤：（a）提供具有顶表面，底表面，至少一个侧表面和多个孔的片体，其中一些孔在侧表面处敞开; 和（b）密封或缩小在侧面打开的孔。 由于在侧面开口的孔密封或变窄，所以防止了浆料进入片体的内部。 因此，渗透距离缓慢地达到预定值，从而增加了片材的有效寿命。

公开(公告)号：US20110045751A1

公开(公告)日：2011-02-24

申请号：US12907382

申请日：2010-10-19

申请人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  YUNG-CHANG HUNG

发明人： CHUNG-CHIH FENG ,  I-PENG YAO ,  LYANG-GUNG WANG ,  YUNG-CHANG HUNG

IPC分类号： B24B41/06 ,  B32B37/12 ,  B29C65/00

CPC分类号： B24B9/146 ,  B24B37/30 ,  B24B41/068 ,  C08J5/128 ,  C08J2323/06 ,  C08J2323/12 ,  C08J2327/06 ,  C08J2375/04 ,  C09J5/06 ,  C09J2423/046 ,  C09J2423/106 ,  C09J2427/006 ,  C09J2475/006

摘要： The present invention relates to a carrier film for mounting a polishing workpiece. The carrier film comprises a surface substrate and a buffer substrate. The surface substrate consists of first elastomer, the first elastomer comprising a plurality of first holes; wherein the first holes have a drop shape, and each of the first holes has an opening. The buffer substrate consists of second elastomer, the second elastomer comprising a plurality of second holes. The surface substrate and the buffer substrate are adhered with adhesive comprising the first or the second elastomer. A method for making the carrier film is also provided. When polishing, the carrier film provides a good buffer property to conduct and release down force applied on the polishing workpiece.

摘要翻译： 本发明涉及一种用于安装抛光工件的载体膜。 载体膜包括表面基板和缓冲基板。 所述表面基板由第一弹性体构成，所述第一弹性体包括多个第一孔; 其中所述第一孔具有液滴形状，并且每个所述第一孔具有开口。 缓冲衬底由第二弹性体组成，第二弹性体包括多个第二孔。 表面基材和缓冲基材用包含第一或第二弹性体的粘合剂粘合。 还提供了制造载体膜的方法。 当抛光时，载体膜提供良好的缓冲性能以传导和释放施加在抛光工件上的下压力。