公开(公告)号：US10605636B2

公开(公告)日：2020-03-31

申请号：US16307030

申请日：2018-06-13

Applicant: CKD CORPORATION

Inventor： Ryo Eguchi ,  Naotsugu Seko ,  Kazutoshi Ito

IPC: G01F1/42 ,  G01F1/00 ,  G01F1/68 ,  G01F15/10

Abstract: A flowmeter including a sensor passage disposed with a sensor chip for measuring a flow rate and an orifice passage as a bypass passage placed with respect to the sensor passage is provided. The orifice passage has a passage diameter which is smaller than a passage diameter of an inflow passage, a distribution orifice is placed on an inlet side of the sensor passage, and the orifice passage and the distribution orifice are configured such that changing trends in an effective sectional area becomes same in a graph including a vertical axis indicating the effective sectional area and a lateral axis indicating a fluid pressure of a fluid.