公开(公告)号：US20230366668A1

公开(公告)日：2023-11-16

申请号：US18354635

申请日：2023-07-18

申请人： CKD CORPORATION ,  UTSUNOMIYA UNIVERSITY

发明人： Hiroyuki Ishigaki ,  Tomoru Okada ,  Ikuo Futamura ,  Takahiro Mamiya ,  Yoshio Hayasaki

IPC分类号： G01B9/02015 ,  G01B9/02001

CPC分类号： G01B9/0203 ,  G01B9/02007 ,  G01B9/02024 ,  G01B2290/45

摘要： A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.

公开(公告)号：US20230243643A1

公开(公告)日：2023-08-03

申请号：US18295845

申请日：2023-04-05

申请人： CKD CORPORATION

发明人： Hiroyuki Ishigaki ,  Tomoru Okada ,  Ikuo Futamura

IPC分类号： G01B11/24 ,  G01B9/02015 ,  G01B9/02 ,  G01B9/02001

CPC分类号： G01B11/2441 ,  G01B9/0203 ,  G01B9/02024 ,  G01B9/02083 ,  G01B9/02007 ,  G01B2290/70

摘要： A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.