公开(公告)号：US09984908B2

公开(公告)日：2018-05-29

申请号：US14354198

申请日：2012-11-13

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Atsushi Kobayashi ,  Atsuhiko Tabuchi ,  Hideki Wakai ,  Kazutoshi Itoh ,  Yasuhisa Hirose ,  Keiichi Nishikawa ,  Takahiro Minatani

IPC: H01L21/00 ,  H01L21/67 ,  G05D23/19

CPC classification number: H01L21/67103 ,  G05D23/1934 ,  H01L21/67109 ,  H01L21/67248

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

公开(公告)号：US20140262199A1

公开(公告)日：2014-09-18

申请号：US14354198

申请日：2012-11-13

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Atsushi Kobayashi ,  Atsuhiko Tabuchi ,  Hideki Wakai ,  Kazutoshi Itoh ,  Yasuhisa Hirose ,  Keiichi Nishikawa ,  Takahiro Minatani

IPC: H01L21/67

CPC classification number: H01L21/67103 ,  G05D23/1934 ,  H01L21/67109 ,  H01L21/67248

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract translation: 温度控制系统包括：第一温度调节单元，其在第一温度下存储流体; 第二温度调节单元，其在高于第一温度的第二温度下存储流体; 用于使从第一温度调节单元供应的流体通过的低温流路; 用于使从第二温度调节单元供给的流体通过的高温流路; 用于循环流体的旁路流路; 用于使来自低温流路的流体，高温流路和在合流部合流的旁通流路的组合流路; 温度调节部，其使来自所述组合流路的流体冷却/加热半导体制造装置的构件; 以及控制装置，其控制附接到合流部上游的三个流路的可变阀的阀位，并调节三个流路的流量分配比。

公开(公告)号：US11125342B2

公开(公告)日：2021-09-21

申请号：US16722678

申请日：2019-12-20

Applicant: CKD CORPORATION

Inventor： Yasuhisa Hirose ,  Takahiro Minatani ,  Keiichi Nishikawa ,  Yoshinori Tanaka ,  Naofumi Yoshida

IPC: F16K3/34 ,  F16K11/07 ,  F16K3/26 ,  F16K27/00

Abstract: A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.

公开(公告)号：US10907748B2

公开(公告)日：2021-02-02

申请号：US16127807

申请日：2018-09-11

Applicant: CKD Corporation

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Keiichi Nishikawa ,  Yasuhisa Hirose ,  Takahiro Minatani

IPC: F16K3/18 ,  F16K31/06 ,  F16K3/316 ,  F16K11/065

Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.

公开(公告)号：US10553463B2

公开(公告)日：2020-02-04

申请号：US15988128

申请日：2018-05-24

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Atsushi Kobayashi ,  Atsuhiko Tabuchi ,  Hideki Wakai ,  Kazutoshi Itoh ,  Yasuhisa Hirose ,  Keiichi Nishikawa ,  Takahiro Minatani

IPC: H01L21/67 ,  H01L21/683 ,  H01L21/66

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

公开(公告)号：US11566723B2

公开(公告)日：2023-01-31

申请号：US17130731

申请日：2020-12-22

Applicant: CKD Corporation

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Keiichi Nishikawa ,  Yasuhisa Hirose ,  Takahiro Minatani

IPC: F16K31/06 ,  F16K3/18 ,  F16K3/316 ,  F16K11/065

Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

公开(公告)号：US20200208745A1

公开(公告)日：2020-07-02

申请号：US16722678

申请日：2019-12-20

Applicant: CKD CORPORATION

Inventor： Yasuhisa Hirose ,  Takahiro Minatani ,  Keiichi Nishikawa ,  Yoshinori Tanaka ,  Naofumi Yoshida

IPC: F16K3/34 ,  F16K11/07 ,  F16K3/26

Abstract: A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.