公开(公告)号：US09267614B2

公开(公告)日：2016-02-23

申请号：US14330049

申请日：2014-07-14

Applicant: CKD CORPORATION

Inventor： Yoshiyuki Yamada ,  Shunsuke Umezawa

IPC: F16K51/02 ,  F16K27/02 ,  F16K1/46 ,  F16K31/126

CPC classification number: F16K51/02 ,  F16K1/46 ,  F16K27/02 ,  F16K31/126

Abstract: An external seal structure in a vacuum valve in which an upper end plate of a partition wall member is held between a valve body and a cylinder cover. An annular seal member for main fluid is placed between the upper end plate and the valve body to prevent material gas from leaking to atmosphere through an abutting section defined by the valve body and the cylinder cover connected in abutting manner. The main-fluid annular seal member is made of perfluoroelastomer. A fluorinated annular seal member made of fluorinated resin is placed between the upper end plate and the valve body and between the main-fluid annular seal member and the abutting section. A leak port communicated with outside air is provided in the valve body to communicate with between a seal point of the main-fluid annular seal member and a seal point of the fluorinated annular seal member.

Abstract translation: 真空阀中的外部密封结构，其中分隔壁构件的上端板保持在阀体和气缸盖之间。 用于主流体的环形密封构件被放置在上端板和阀体之间，以防止材料气体通过由邻接的方式连接的阀体和气缸盖限定的邻接部分泄漏到大气中。 主流体环形密封件由全氟弹性体制成。 由氟化树脂制成的氟化环状密封件设置在上端板和阀体之间以及主流体环形密封件与抵接部之间。 与外部空气连通的泄漏口设置在阀体中，以与主流体环形密封构件的密封点和氟化环形密封构件的密封点之间连通。

公开(公告)号：US11384864B2

公开(公告)日：2022-07-12

申请号：US16747711

申请日：2020-01-21

Applicant: CKD CORPORATION

Inventor： Yoshiyuki Yamada ,  Shunsuke Umezawa

IPC: F16K31/122 ,  F16K51/02 ,  F04C14/18 ,  F16K27/07 ,  F16K27/00 ,  F04C13/00 ,  F16K99/00

Abstract: A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.

公开(公告)号：US08794261B2

公开(公告)日：2014-08-05

申请号：US13758498

申请日：2013-02-04

Applicant: CKD Corporation

Inventor： Masayuki Watanabe ,  Yoshiyuki Yamada ,  Shunsuke Umezawa

IPC: F16K31/02

CPC classification number: F17D3/00 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86485

Abstract: A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter.

Abstract translation: 流体控制系统包括真空室，用于供应气体作为流体的气体供应源，用于从真空室排放流体的排气管，将真空室连接到气体供应源的气体供应管，以及压力 传感器来检测真空室的内部压力。 该系统还包括设置在气体供应源和真空室之间的流量计，放置在流量计和真空室之间的比例阀，压力控制器，用于基于压力传感器的输出来控制比例阀;计量阀， 排气管和流量控制器，以根据流量计的输出来控制计量阀。