公开(公告)号：US10741762B2

公开(公告)日：2020-08-11

申请号：US14394348

申请日：2013-04-30

Applicant: CLAP Co., Ltd.

Inventor： Thomas Musiol ,  Dieter Freyberg ,  Jochen Brill

IPC: H01L51/00 ,  C09B57/10 ,  C09B57/08 ,  C23C14/12 ,  C09B57/00 ,  H01L51/56

Abstract: The present invention relates to a method for the deposition of at least one layer of an organic material on a substrate by (a) providing a source of a solid organic material in an atmosphere at a pressure comprised between 50 and 200 kPa, (b) heating said organic material to a first temperature to produce a vapor of said organic material, (c) exposing at least one surface of a substrate having a second temperature lower than said first temperature to said vapor to deposit organic material from said vapor onto said at least one surface of said substrate.