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公开(公告)号:US3119947A
公开(公告)日:1964-01-28
申请号:US9029261
申请日:1961-02-20
Applicant: CLEVITE CORP
Inventor: ADOLF GOETZBERGER
IPC: H01J1/308 , H01L21/00 , H01L29/00
CPC classification number: H01L21/00 , H01J1/308 , H01L29/00