公开(公告)号：US3649862A

公开(公告)日：1972-03-14

申请号：US3649862D

申请日：1969-05-01

Applicant: COLUTRON CORP

Inventor： WAHLIN LARS E

IPC: G21K1/08 ,  H01J27/02 ,  H01J49/28 ,  H05H5/00

CPC classification number: H01J27/02 ,  G21K1/08 ,  H01J49/286

Abstract: An ion beam source includes an ion source, ion accelerator and focusing system, and a velocity filter with a deflection plate pair. The velocity filter provides for dispersion of ions according to their charge, mass and velocity. The ion source includes a nonconducting barrel, a filament mounted in the barrel and an anode enclosing the barrel opening except for a source aperture. Filament current is arranged to provide an electron current to the anode, this electron current ionizes the charge material thus forming a plasma cloud for ejecting into the focusing and lens system, and then into a velocity filter causing separation of ion beam.

Abstract translation: 离子束源包括离子源，离子加速器和聚焦系统以及具有偏转板对的速度滤波器。 速度滤波器根据其电荷，质量和速度提供离子的分散。 离子源包括不导电筒，安装在镜筒中的灯丝和除了源孔以外包围镜筒开口的阳极。 灯丝电流被布置为向阳极提供电子电流，该电子电流使电荷材料电离，从而形成等离子体云，用于喷射到聚焦透镜系统中，然后进入导致离子束分离的速度滤光器。

公开(公告)号：US3465244A

公开(公告)日：1969-09-02

申请号：US3465244D

申请日：1966-06-06

Applicant: COLUTRON CORP

Inventor： WAHLIN LARS E

IPC: G01T1/29 ,  G01N27/62

CPC classification number: G01T1/29