专利检索 ap:("COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES") AND inv:"Alexi Cardoso" 第 1 页

1.

发明授权
Process for producing a microbolometer comprising a vanadium-oxide-based sensitive material 有权

公开(公告)号：US12066332B2

公开(公告)日：2024-08-20

申请号：US17629995

申请日：2020-07-27

申请人： COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

发明人： Denis Pelenc , Giacomo Badano , Alexi Cardoso , Marc Guillaumont

IPC分类号： G01J5/04 , G01J5/20 , H10N15/10

CPC分类号： G01J5/046 , G01J5/045 , G01J5/20 , H10N15/15

摘要： A process for producing a microbolometer including a vanadium-oxide-based sensitive material containing an additional chemical element chosen from arsenic, germanium, silicon and phosphorus, the process including: determining an effective amount of the additional chemical element from which the modified compound, having undergone a step of exposure to a temperature Tr for a time Δtr, exhibits an electrical resistivity ρa|r at room temperature that is higher than 10% of its native value; producing the sensitive material in a thin layer, this material being formed from the modified compound having an amount of the additional chemical element that is greater than or equal to the effective amount; and exposing the sensitive material to the temperature Tr for the time Δtr.