METHOD OF FORMING CERAMIC FLUIDIC MODULES WITH SMOOTH INTERIOR SURFACES AND MODULES PRODUCED

    公开(公告)号:US20250011246A1

    公开(公告)日:2025-01-09

    申请号:US18706423

    申请日:2022-11-02

    Abstract: A fluidic module includes a monolithic closed-porosity ceramic body that has a first region and a second region with the first region disposed between the second region. The first and second regions are configured to differ from one another with respect to a common attribute of a ceramic material of the ceramic body. The common attribute can differ by forming the first and second regions from ceramic particles that differ with respect their particle sizes. The fluidic module further includes a tortuous fluid passage that extends through the ceramic body. The fluid passage is surrounded by the first region such that the fluid passage is separated entirely from the second region at least within a planar region of the ceramic body. The fluid passage has an interior surface with a surface roughness of less than or equal to 5 μm Ra. A method for forming the fluidic module is disclosed.

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