METHODS FOR PROCESSING A SUBSTRATE
    3.
    发明申请

    公开(公告)号:US20190275782A1

    公开(公告)日:2019-09-12

    申请号:US16349845

    申请日:2017-11-13

    Abstract: A method of processing a substrate, with a first major surface of the substrate removably bonded to a first major surface of a first carrier and a second major surface of the substrate removably bonded to a first major surface of a second carrier, includes initiating debonding at a first location of an outer peripheral bonded interface between the substrate and the first carrier to separate a portion of the first carrier from the substrate. The method further includes propagating a first debond front from the first debonded location along a first direction extending away from the first debonded location by sequentially applying a plurality of lifting forces to the first carrier at a corresponding plurality of sequential lifting locations of the first carrier.

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