公开(公告)号：US09689656B2

公开(公告)日：2017-06-27

申请号：US14434805

申请日：2013-10-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Toshifumi Sugawara ,  Eunsun Kim ,  Yoshiaki Tatsumi

IPC: G01B7/00 ,  H01L21/67 ,  G01B7/02 ,  G01D5/24 ,  H01L21/673 ,  G01D5/241

CPC classification number: G01B7/002 ,  G01B7/003 ,  G01B7/02 ,  G01D5/24 ,  G01D5/2412 ,  H01L21/67259 ,  H01L21/673

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

公开(公告)号：US20150268026A1

公开(公告)日：2015-09-24

申请号：US14434805

申请日：2013-10-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Toshifumi Sugawara ,  Eunsun Kim ,  Yoshiaki Tatsumi

IPC: G01B7/00 ,  G01D5/24 ,  H01L21/673 ,  G01B7/02

CPC classification number: G01B7/002 ,  G01B7/003 ,  G01B7/02 ,  G01D5/24 ,  G01D5/2412 ,  H01L21/67259 ,  H01L21/673

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

Abstract translation: 提供一种能够检测工件（w）在平面方向上的横向位移的工件保持装置以及使用工件保持装置检测工件（w）的横向位移的方法。 通过安装在支撑板上的粘合剂垫（2）构造成保持工件（w）的工件保持装置包括：电容测量装置（5），包括由第一和第二电极（3a）形成的电极对 ，3b）并且至少布置在与所述工件（w）的周边部分相对应的位置的一部分处，所述电容测量装置（5）被配置为测量所述电极对的电容; 以及比较器电路（6），被配置为将所测量的电容与预定参考值进行比较，从而检测所述工件（w）在所述支撑板（1）的平面方向上的横向位移。 此外，检测工件的横向位移的方法（w）包括将电容输入与比较器电路（6）进行比较以预定的参考值，从而检测工件的横向位移（w）。