公开(公告)号：US20150288302A1

公开(公告)日：2015-10-08

申请号：US14441937

申请日：2013-10-21

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Yoshiaki Tatsumi ,  Toshifumi Sugawara

IPC: H02N13/00 ,  C03C17/00

CPC classification number: H02N13/00 ,  B65G49/061 ,  C03C17/002 ,  C23C14/50 ,  H01L21/6831 ,  Y10T29/49998

Abstract: An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck (1) provided with a base member (2) and an electrostatic suction layer (3). The base member (2) is formed by a lower-surface plate (20), side-surface plates (21-24), and an upper-surface plate (25), and has a part (4) for a plurality of individual structures configured therein. The part (4) for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes (40) and enables the weight of the base member (2) to be reduced and the strength thereof increased.

Abstract translation: 一种静电卡盘，其能够对待加工的板进行高速度和高质量的加工，并且其中底部构件的重量减小并且其强度增加，以便保持基底构件的平坦度并防止板 从下降处理 玻璃基板处理方法; 和玻璃基板。 设置有基体部件（2）和静电吸附层（3）的静电卡盘（1）。 基部构件（2）由下表面板（20），侧面板（21-24）和上表面板（25）形成，并且具有用于多个个体的部分（4） 配置在其中的结构。 用于多个单独结构的部分（4）具有由正六边形管（40）引起的蜂窝结构，并且能够减小基部构件（2）的重量并且其强度增加。

公开(公告)号：US20150268026A1

公开(公告)日：2015-09-24

申请号：US14434805

申请日：2013-10-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Toshifumi Sugawara ,  Eunsun Kim ,  Yoshiaki Tatsumi

IPC: G01B7/00 ,  G01D5/24 ,  H01L21/673 ,  G01B7/02

CPC classification number: G01B7/002 ,  G01B7/003 ,  G01B7/02 ,  G01D5/24 ,  G01D5/2412 ,  H01L21/67259 ,  H01L21/673

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

Abstract translation: 提供一种能够检测工件（w）在平面方向上的横向位移的工件保持装置以及使用工件保持装置检测工件（w）的横向位移的方法。 通过安装在支撑板上的粘合剂垫（2）构造成保持工件（w）的工件保持装置包括：电容测量装置（5），包括由第一和第二电极（3a）形成的电极对 ，3b）并且至少布置在与所述工件（w）的周边部分相对应的位置的一部分处，所述电容测量装置（5）被配置为测量所述电极对的电容; 以及比较器电路（6），被配置为将所测量的电容与预定参考值进行比较，从而检测所述工件（w）在所述支撑板（1）的平面方向上的横向位移。 此外，检测工件的横向位移的方法（w）包括将电容输入与比较器电路（6）进行比较以预定的参考值，从而检测工件的横向位移（w）。

公开(公告)号：US10737277B2

公开(公告)日：2020-08-11

申请号：US15743105

申请日：2016-09-08

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Li Luo ,  Yoshiaki Tatsumi ,  Kazuki Tsuboi

IPC: B03C3/16 ,  B03C3/47 ,  B03C3/49 ,  B03C3/02 ,  B03C3/40 ,  B03C3/45 ,  B64C27/08 ,  B64C39/02 ,  F24F7/007 ,  F24F7/00 ,  B03C3/15 ,  F24F3/16

Abstract: An air cleaner includes a flying body having a main body unit in which a control unit controlling flying movement is stored, and a propeller disposed around the main body as propulsion for floating the flying body; and a dust collector connected to the flying body, and including an intake opening and an exhaust opening. The propeller is disposed inside or under the dust collector, the dust collector electrostatically attracts dust in air flowing from the intake opening, and the flying body is a drone structured so that the propeller takes in air from an upper side and exhausts the air to a lower side.

公开(公告)号：US10376606B2

公开(公告)日：2019-08-13

申请号：US15568197

申请日：2016-05-13

Applicant: CREATIVE TECHNOLOGY CORPORATION ,  MATSUDA DESIGN LTD

Inventor： Satomi Koyama ,  Yoshiaki Tatsumi ,  Li Luo ,  Kazuki Tsuboi ,  Mutsumi Kusano ,  Takeshi Matsuda ,  Shujiro Hayashi

IPC: A61L2/20 ,  C01B13/11 ,  A61L2/10 ,  A01N59/00 ,  A61L2/26

Abstract: A sterilizing sheet is excellent in terms of saving space when a sterilizing operation is being performed, and sterilizing objects of various sizes. This sterilizing sheet is provided with a flexible sheet body, a sheet accommodating body and a handle. The sheet body is formed from a dielectric and a pair of electrodes accommodated inside the dielectric. The sheet accommodating body is a cylindrical body in which the sheet body is accommodated to be capable of being pulled out and rewound, and is provided with a case, a rotating body and a rewinding mechanism. The rewinding mechanism is a mechanism for automatically rewinding the sheet body, when pulled out from the sheet accommodating body, back into the sheet accommodating body. The handle is attached to a distal end portion of the sheet body, and includes, inside the handle, a battery, a switch mechanism, a booster circuit and a monitoring circuit.

公开(公告)号：US10005087B2

公开(公告)日：2018-06-26

申请号：US14915335

申请日：2014-08-02

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Yoshiaki Tatsumi ,  Yu Saito ,  Toshifumi Sugawara

IPC: B03C3/47 ,  B03C3/49 ,  B03C3/68 ,  B03C3/06 ,  B03C3/41

CPC classification number: B03C3/47 ,  B03C3/06 ,  B03C3/41 ,  B03C3/49 ,  B03C3/68 ,  B03C2201/24 ,  B03C2201/32

Abstract: A particle collector system includes a dust collection unit, a power source unit, and a capacitance measurement unit. The dust collection unit includes first and second electrodes, a second electrode, and a dielectric body covering the electrodes. The power source unit supplies power source voltage to the first and second electrodes. The capacitance measurement unit measures the capacitance between the first and second electrodes. With this particle collector system and dust collection method using it, particles can be almost completely removed without periodic performance of a particle removal operation.

公开(公告)号：US09536709B2

公开(公告)日：2017-01-03

申请号：US14763931

申请日：2014-01-09

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Satomi Koyama ,  Li Luo ,  Yoshiaki Tatsumi

IPC: H01J37/32 ,  H05H1/24

CPC classification number: H01J37/32348 ,  H01J2237/335 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2245/1225

Abstract: A large-sized plasma generator is suited to various surface shapes and has a longer service life and improved energy conservation. An example of the plasma generator (1-1) has a dielectric layer (3), first and second electrodes (4, 5) that are formed within the dielectric layer, an alternating-current power supply (6), and a first metal layer (7). The dielectric layer (3) is composed of polymer resin layers (31, 32) that are formed of a polyimide resin. The electrodes are arranged side by side within the dielectric layer. The first metal layer is formed of a metal having a sterilization effect, and has a plurality of pores (71) in the surface. The first metal layer spans between supporting parts (33, 34) of the polymer resin layer (32), and faces the whole of the electrodes. A gap (S) is formed between the first metal layer and the polymer resin layer.

Abstract translation: 大型等离子体发生器适用于各种表面形状，具有更长的使用寿命和更好的节能。 等离子体发生器（1-1）的示例具有介电层（3），形成在电介质层内的第一和第二电极（4,5），交流电源（6）和第一金属 层（7）。 电介质层（3）由聚酰亚胺树脂形成的聚合物树脂层（31,32）构成。 电极并排设置在电介质层内。 第一金属层由具有灭菌效果的金属形成，并且在表面上具有多个孔（71）。 第一金属层跨越聚合物树脂层（32）的支撑部分（33,34）之间并面向整个电极。 在第一金属层和聚合物树脂层之间形成间隙（S）。

公开(公告)号：US09689656B2

公开(公告)日：2017-06-27

申请号：US14434805

申请日：2013-10-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Toshifumi Sugawara ,  Eunsun Kim ,  Yoshiaki Tatsumi

IPC: G01B7/00 ,  H01L21/67 ,  G01B7/02 ,  G01D5/24 ,  H01L21/673 ,  G01D5/241

CPC classification number: G01B7/002 ,  G01B7/003 ,  G01B7/02 ,  G01D5/24 ,  G01D5/2412 ,  H01L21/67259 ,  H01L21/673

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

公开(公告)号：US20150371829A1

公开(公告)日：2015-12-24

申请号：US14763931

申请日：2014-01-09

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Satomi Koyama ,  Li Luo ,  Yoshiaki Tatsumi

IPC: H01J37/32

CPC classification number: H01J37/32348 ,  H01J2237/335 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2245/1225

Abstract: A large-sized plasma generator is suited to various surface shapes and has a longer service life and improved energy conservation. An example of the plasma generator (1-1) has a dielectric layer (3), first and second electrodes (4, 5) that are formed within the dielectric layer, an alternating-current power supply (6), and a first metal layer (7). The dielectric layer (3) is composed of polymer resin layers (31, 32) that are formed of a polyimide resin. The electrodes are arranged side by side within the dielectric layer. The first metal layer is formed of a metal having a sterilization effect, and has a plurality of pores (71) in the surface. The first metal layer spans between supporting parts (33, 34) of the polymer resin layer (32), and faces the whole of the electrodes. A gap (S) is formed between the first metal layer and the polymer resin layer.

Abstract translation: 大型等离子体发生器适用于各种表面形状，具有更长的使用寿命和更好的节能。 等离子体发生器（1-1）的示例具有介电层（3），形成在电介质层内的第一和第二电极（4,5），交流电源（6）和第一金属 层（7）。 电介质层（3）由聚酰亚胺树脂形成的聚合物树脂层（31,32）构成。 电极并排设置在电介质层内。 第一金属层由具有灭菌效果的金属形成，并且在表面上具有多个孔（71）。 第一金属层跨越聚合物树脂层（32）的支撑部分（33,34）之间并面向整个电极。 在第一金属层和聚合物树脂层之间形成间隙（S）。

公开(公告)号：US11866281B2

公开(公告)日：2024-01-09

申请号：US17265047

申请日：2019-08-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Daiki Kaneko ,  Yoshiaki Tatsumi ,  Shinsuke Hirano

IPC: B65H3/18 ,  B25J15/06 ,  B32B15/082 ,  B32B15/20 ,  B32B27/28 ,  B32B27/30 ,  B65H3/08

CPC classification number: B65H3/08 ,  B25J15/06 ,  B32B15/082 ,  B32B15/20 ,  B32B27/281 ,  B32B27/304 ,  B32B2250/03 ,  B32B2307/202 ,  B32B2307/206 ,  B32B2457/00

Abstract: Provided is an electrostatic adsorption body capable of exhibiting a high adsorption force, especially with respect to a highly insulative sheet-like object to be adsorbed, such as a cloth, while using an electrical adsorption force. This electrostatic adsorption body, which uses electrostatic force to adsorb an object to be adsorbed, is provided with: a laminate sheet in which a 20-200 μm-thick insulator, a 1-20 μm-thick electrode layer, and a 20-200 μm-thick resin film are sequentially laminated; and a power supply device that applies a voltage to the electrode layer, wherein the resin film at least has a tensile modulus of 1 MPa or more and less than 100 MPa and a volume resistivity of 1×1010-1013 Ω cm, the electrode layer is composed of a bipolar electrode including a positive electrode and a negative electrode, and an object to be adsorbed is adsorbed using the resin film as an adsorption surface due to an electrostatic adsorption force that is generated by applying a voltage to the electrode layer.

公开(公告)号：US11766493B2

公开(公告)日：2023-09-26

申请号：US16757987

申请日：2018-11-07

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Satomi Koyama ,  Shinsuke Hirano ,  Yoshiaki Tatsumi

IPC: A61L2/20 ,  A42C3/04 ,  A61L9/015 ,  A42B3/00

CPC classification number: A61L2/202 ,  A42C3/04 ,  A61L9/015 ,  A42B3/006 ,  A61L2202/11 ,  A61L2202/26

Abstract: Provided are a headgear stand and a headgear cleaner that is small-sized and has low power consumption, and that is capable of sterilizing and deodorizing headgear made of any material. A headgear cleaner 1-1 is provided with an ozone generator 2 and a voltage supply part 5. The ozone generator 2 is constituted from an ozone generator body 3-1 and a connecting part 4. The ozone generator body 3-1 forms a shape in which twelve leaf parts extend radially. The voltage supply part 5 supplies a voltage necessary for generating ozone to the ozone generator 2.